Abstract
This paper presents a three-dimensional microfabrication and integration technology for MEMS smart materials utilizing a spray coating method. Spray coating is shown to be most effective for additional deposition on non-planar surfaces. PZT films were formed on both flat and uneven surfaces at a thickness of about 1 mm. Perovskite structures were formed with suitable heat treatment and the ferroelectric P-E hysteresis loop was also obtained. This paper is the first report from our group and other researchers on the deposition of smart materials for MEMS using a spray coating method. Spray coating has been proposed as an effective three-dimensional coating method for depositing piezoelectric, pyroelectric, and magnetic substances for sensors and actuators. The hydrophilic and hydrophobic properties between the substrate surface and ejected liquid are the key process factors in the spray coating method for improving the film growth conditions.
| Original language | English |
|---|---|
| Pages (from-to) | 113-116 |
| Number of pages | 4 |
| Journal | Key Engineering Materials |
| Volume | 269 |
| DOIs | |
| State | Published - 2004 |
| Externally published | Yes |
| Event | Proceedings of the 23rd Electronics Division Meeting of the Ceramic Society of Japan - Kawasaki, Japan Duration: 23 Oct 2003 → 24 Oct 2003 |
Keywords
- Ferroelectric properties
- MEMS
- PZT
- Perovskite structure
- Spray coating method
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