Abstract
In this paper, we present and develop a programmable UV lithography system with multilayer alignment for cylindrical substrates. By using this system various microstructures with different patterns can be fabricated on the capillary surface, and ±1μm alignment precision can be realized. A home-made spray coating system is also developed for capillary substrates. A flexible implantable microtemperature sensor for hyperthermia application has been designed and fabricated on the polymer capillary with 330μm diameter. The finiteelement transient simulation indicates the sensor can realize ∼2ms quick response. Magnetron sputtered platinum film is used as the sensing material considering its good resistancetemperature effect. The test temperature coefficient of resistance of the fabricated flexible microsensors is 0.0035/°C, which is close to the industry standard value of the bulk Pt resistor sensor. The current-voltage curves of the sensor at different temperatures have been tested. The test sensitivity of the temperature sensor is 1.485ω/°C. The present flexible implantable microtemperature sensor is promising to be used as an important interventional monitoring device for biomedical applications.
| Original language | English |
|---|---|
| Article number | 6553382 |
| Pages (from-to) | 21-29 |
| Number of pages | 9 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 23 |
| Issue number | 1 |
| DOIs | |
| State | Published - Feb 2014 |
| Externally published | Yes |
Keywords
- Flexible microtemperature sensor
- biomedical
- capillary
- implantable
- programmable lithography alignment