TY - GEN
T1 - Five-frame phase-shifting algorithm based on the immunity to phase-shifting error
AU - Zhang, Fei
AU - Li, Bing
AU - Jiang, Zhuangde
AU - Wang, Zhaomin
PY - 2009
Y1 - 2009
N2 - This paper designs a kind of phase shifting algorithm of white light Interferometry technology, aiming at high precision measurement of MEMS. Through analyzing the error source of phase shifting in theory, five-frame phase-shifting algorithm based on the immunity to phase-shifting error is presented. In the proposed algorithm, phase shifting distance is set to be λ/8 per step, and the interference fringe phase is changed π/2 each time. Measurement accuracy of the algorithm has been verified, through the measurement of the standard bench height which has been authenticated by United Kingdom Accreditation Service. The experimental results show that the proposed algorithm can eliminate the transposition error factor and improve the measurement accuracy. Meanwhile, it also has more powerful effect on noise inhibition, and the measurement repeatability is in sub-nanometer.
AB - This paper designs a kind of phase shifting algorithm of white light Interferometry technology, aiming at high precision measurement of MEMS. Through analyzing the error source of phase shifting in theory, five-frame phase-shifting algorithm based on the immunity to phase-shifting error is presented. In the proposed algorithm, phase shifting distance is set to be λ/8 per step, and the interference fringe phase is changed π/2 each time. Measurement accuracy of the algorithm has been verified, through the measurement of the standard bench height which has been authenticated by United Kingdom Accreditation Service. The experimental results show that the proposed algorithm can eliminate the transposition error factor and improve the measurement accuracy. Meanwhile, it also has more powerful effect on noise inhibition, and the measurement repeatability is in sub-nanometer.
KW - Error analysis
KW - MEMS
KW - Phase extraction algorithm
UR - https://www.scopus.com/pages/publications/70350513894
U2 - 10.1109/SOPO.2009.5230282
DO - 10.1109/SOPO.2009.5230282
M3 - 会议稿件
AN - SCOPUS:70350513894
SN - 9781424444113
T3 - 2009 Symposium on Photonics and Optoelectronics, SOPO 2009
BT - 2009 Symposium on Photonics and Optoelectronics, SOPO 2009
T2 - 2009 Symposium on Photonics and Optoelectronics, SOPO 2009
Y2 - 14 August 2009 through 16 August 2009
ER -