Femtosecond Laser Fabrication of Submillimeter Microlens Arrays with Tunable Numerical Apertures

In recent years, the demand for optical components such as microlenses has been increasing, and various methods have been developed. However, fabrication of submillimeter microlenses with tunable numerical aperture (NA) on hard and brittle materials remains a great challenge using the current methods. In this work, we fabricated a variable NA microlens array with submillimeter size on a silica substrate, using a femtosecond laser-based linear scanning-assisted wet etching method. At the same time, the influence of various processing parameters on the microlens morphology and NA was studied. The NA of the microlenses could be flexibly adjusted in the range of 0.2 to 0.45 by changing the scanning distance of the laser and assisted wet etching. In addition, the imaging and focusing performance tests demonstrated the good optical performance and controllability of the fabricated microlenses. Finally, the optical performance simulation of the prepared microlens array was carried out. The result was consistent with the actual situation, indicating the potential of the submillimeter-scale microlens array prepared by this method for applications in imaging and detection.