TY - JOUR
T1 - FEM applied to evaluate composite hardness of SiO2 Film/316 LSS substrate system
AU - Wang, H. R.
AU - Jiang, Z. D.
AU - Zhou, X. Y.
AU - Zhang, Y.
PY - 2006/10/1
Y1 - 2006/10/1
N2 - Due to non-ideal tip, performance of instrument and substrate effect, it is difficult to evaluate either composite mechanical properties of thin film/substrate system or the pure film's properties. In order to get composite hardness of thin film and how the substrate takes effect of the film's properties, FEM is used to simulate the indentation process of SiO2 thin films on 316LSS. With experiments, we observe that the hardness heavily depends the thickness of SiO2 film with different thickness deposited on 316 LSS by PVD. By FEM simulation and calculation, composite hardness is found to decrease greatly with increasing indentation depth. As thickness of film keeps constant, there exists a critical indentation depth about 1/20 of film thickness, less than which composite hardness may be regarded as film hardness. Discussion indicates FEM analysis method in this paper may not only play role in determining composite hardness of thin film/hardness system, but also provide a method to calculate pure hardness of thin film.
AB - Due to non-ideal tip, performance of instrument and substrate effect, it is difficult to evaluate either composite mechanical properties of thin film/substrate system or the pure film's properties. In order to get composite hardness of thin film and how the substrate takes effect of the film's properties, FEM is used to simulate the indentation process of SiO2 thin films on 316LSS. With experiments, we observe that the hardness heavily depends the thickness of SiO2 film with different thickness deposited on 316 LSS by PVD. By FEM simulation and calculation, composite hardness is found to decrease greatly with increasing indentation depth. As thickness of film keeps constant, there exists a critical indentation depth about 1/20 of film thickness, less than which composite hardness may be regarded as film hardness. Discussion indicates FEM analysis method in this paper may not only play role in determining composite hardness of thin film/hardness system, but also provide a method to calculate pure hardness of thin film.
UR - https://www.scopus.com/pages/publications/33947643791
U2 - 10.1088/1742-6596/48/1/203
DO - 10.1088/1742-6596/48/1/203
M3 - 文章
AN - SCOPUS:33947643791
SN - 1742-6588
VL - 48
SP - 1090
EP - 1095
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 203
ER -