@inproceedings{1d3798ffda39487092a5458791d5fe58,
title = "Facile and flexible fabrication of gapless microlens arrays using a femtosecond laser microfabrication and replication process",
abstract = "We demonstrate a facile and flexible method to fabricate close-packed microlens arrays (MLAs). Glass molding templates with concave structures are produced by a femtosecond (fs)-laser point-by-point exposures followed by a chemical treatment, and convex MLAs are subsequently replicated on Poly(methyl methacrylate) [PMMA] using a hot embossing system. As an example, a microlens array (MLA) with 60-μm rectangular-shaped spherical microlenses is fabricated. Optical performances of the MLAs, such as focusing and imaging properties are tested, and the results demonstrate the uniformity and smooth surfaces of the MLA. We also demonstrated that the shape and alignment of the arrays could be controlled by different parameters.",
keywords = "Femtosecond laser, Glasses, Hot embossing, Microfabrication, Microlenses",
author = "Hewei Liu and Feng Chen and Qing Yang and Yang Hu and Chao Shan and Shengguan He and Jinhai Si and Xun Hou",
year = "2012",
doi = "10.1117/12.905942",
language = "英语",
isbn = "9780819488862",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII",
note = "Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII ; Conference date: 23-01-2012 Through 26-01-2012",
}