@inproceedings{807677d74efd49aaafb9274c0f782dfd,
title = "Fabrication of two-point-supported annular-type microresonators with capacitive transducer gaps",
abstract = "Disk microresonators employing in-plane resonant modes are promising candidates as functional elements for high-sensitive mass sensing applications because they provide a high quality factor (Q) in air at atmospheric pressure. The authors have newly designed and fabricated single crystal silicon (SCS) annular micromechanical resonators with an inner to outer radius ratio of 0.17. The beam structures to support the resonator were connected to the two nodal points expected for a specified in-plane resonant mode. The resonator was electrostatically driven and detected with 150-nm-wide vertical transducer gaps that were fabricated by trench etching of the SCS using deep reactive ion etching (D-RIE) with a resist mask patterned by electron beam lithography. The fabricated resonators show a resonant peak at 50.10 MHz with a Q of 3000 in air. The measured peak resonant frequency agreed well with the frequency predicted by finite element simulations.",
keywords = "annular resonator, in-plane resonant mode, nodal point, resonant frequency, transducer gap",
author = "Sunao Murakami and Mitsuo Konno and Tsuyoshi Ikehara and Ryutaro Maeda and Takashi Mihara",
year = "2011",
doi = "10.1109/NEMS.2011.6017452",
language = "英语",
isbn = "9781612847757",
series = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
pages = "707--710",
booktitle = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
note = "6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 ; Conference date: 20-02-2011 Through 23-02-2011",
}