Fabrication of three-dimensional microchannels inside silicon using a femtosecond laser

Cunxia Li; Tao Chen; Jinhai Si; Feng Chen; Xu Shi; Xun Hou

doi:10.1088/0960-1317/19/12/125007

Fabrication of three-dimensional microchannels inside silicon using a femtosecond laser

Cunxia Li
, Tao Chen
, Jinhai Si
, Feng Chen
, Xu Shi
, Xun Hou

Faculty of Electronic and Information Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

We report on photo-induced microchannels created within single-crystal silicon using 800 nm femtosecond laser pulses. The 800 nm wavelength is in the absorption region of silicon. Using combined transverse scanning and longitudinal scanning, we can fabricate arbitrary three-dimensional microchannels in the interior of silicon, to a depth of several hundred micrometers, without surface damage. The diameter of the photo-induced microchannels can be controlled by varying laser power, scan velocity and focal depth.

Original language	English
Article number	125007
Journal	Journal of Micromechanics and Microengineering
Volume	19
Issue number	12
DOIs	https://doi.org/10.1088/0960-1317/19/12/125007
State	Published - 2009

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title = "Fabrication of three-dimensional microchannels inside silicon using a femtosecond laser",

abstract = "We report on photo-induced microchannels created within single-crystal silicon using 800 nm femtosecond laser pulses. The 800 nm wavelength is in the absorption region of silicon. Using combined transverse scanning and longitudinal scanning, we can fabricate arbitrary three-dimensional microchannels in the interior of silicon, to a depth of several hundred micrometers, without surface damage. The diameter of the photo-induced microchannels can be controlled by varying laser power, scan velocity and focal depth.",

author = "Cunxia Li and Tao Chen and Jinhai Si and Feng Chen and Xu Shi and Xun Hou",

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AU - Li, Cunxia

AU - Chen, Tao

AU - Si, Jinhai

AU - Chen, Feng

AU - Shi, Xu

AU - Hou, Xun

PY - 2009

Y1 - 2009

N2 - We report on photo-induced microchannels created within single-crystal silicon using 800 nm femtosecond laser pulses. The 800 nm wavelength is in the absorption region of silicon. Using combined transverse scanning and longitudinal scanning, we can fabricate arbitrary three-dimensional microchannels in the interior of silicon, to a depth of several hundred micrometers, without surface damage. The diameter of the photo-induced microchannels can be controlled by varying laser power, scan velocity and focal depth.

AB - We report on photo-induced microchannels created within single-crystal silicon using 800 nm femtosecond laser pulses. The 800 nm wavelength is in the absorption region of silicon. Using combined transverse scanning and longitudinal scanning, we can fabricate arbitrary three-dimensional microchannels in the interior of silicon, to a depth of several hundred micrometers, without surface damage. The diameter of the photo-induced microchannels can be controlled by varying laser power, scan velocity and focal depth.

UR - https://www.scopus.com/pages/publications/70450184413

U2 - 10.1088/0960-1317/19/12/125007

DO - 10.1088/0960-1317/19/12/125007

M3 - 文章

AN - SCOPUS:70450184413

SN - 0960-1317

VL - 19

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 12

M1 - 125007

ER -

Fabrication of three-dimensional microchannels inside silicon using a femtosecond laser

Abstract

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