Fabrication of three dimensional micro structure composed of different materials using excimer laser ablation and jet molding

Jun Akedo; Masaaki Ichiki; Kaoru Kikuchi; Ryutaro Maeda

Fabrication of three dimensional micro structure composed of different materials using excimer laser ablation and jet molding

Jun Akedo
, Masaaki Ichiki
, Kaoru Kikuchi
, Ryutaro Maeda

National Institute of Advanced Industrial Science and Technology

Research output: Contribution to conference › Paper › peer-review

27 Scopus citations

Abstract

Fabrication technology was developed for realization of three dimensional micro structure composed of different materials using excimer laser ablation and ultra fine particle jet molding. This method enables micro devices composed of actuator and sensor materials (PZT) and electrodes (metal). SEM observation and density and electrical property measurement showed a good pattern transfer fidelity with sufficient deposited layer quality (density of better than 85%, dielectric constant of deposited PZT layer of 760). Deposition rate of PZT was much faster than any other deposition techniques and up to 40 μm of thick PZT layer was successfully formed with proper metal electrode structure.

Original language	English
Pages	135-140
Number of pages	6
State	Published - 1997
Externally published	Yes
Event	Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS - Nagoya, Jpn Duration: 26 Jan 1997 → 30 Jan 1997

Conference

Conference	Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS
City	Nagoya, Jpn
Period	26/01/97 → 30/01/97

Cite this

@conference{3daf0799da2341689ed802222157507c,

title = "Fabrication of three dimensional micro structure composed of different materials using excimer laser ablation and jet molding",

abstract = "Fabrication technology was developed for realization of three dimensional micro structure composed of different materials using excimer laser ablation and ultra fine particle jet molding. This method enables micro devices composed of actuator and sensor materials (PZT) and electrodes (metal). SEM observation and density and electrical property measurement showed a good pattern transfer fidelity with sufficient deposited layer quality (density of better than 85\%, dielectric constant of deposited PZT layer of 760). Deposition rate of PZT was much faster than any other deposition techniques and up to 40 μm of thick PZT layer was successfully formed with proper metal electrode structure.",

author = "Jun Akedo and Masaaki Ichiki and Kaoru Kikuchi and Ryutaro Maeda",

year = "1997",

language = "英语",

pages = "135--140",

note = "Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS ; Conference date: 26-01-1997 Through 30-01-1997",

}

Fabrication of three dimensional micro structure composed of different materials using excimer laser ablation and jet molding. / Akedo, Jun; Ichiki, Masaaki; Kikuchi, Kaoru et al.
1997. 135-140 Paper presented at Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, Nagoya, Jpn.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Fabrication of three dimensional micro structure composed of different materials using excimer laser ablation and jet molding

AU - Akedo, Jun

AU - Ichiki, Masaaki

AU - Kikuchi, Kaoru

AU - Maeda, Ryutaro

PY - 1997

Y1 - 1997

N2 - Fabrication technology was developed for realization of three dimensional micro structure composed of different materials using excimer laser ablation and ultra fine particle jet molding. This method enables micro devices composed of actuator and sensor materials (PZT) and electrodes (metal). SEM observation and density and electrical property measurement showed a good pattern transfer fidelity with sufficient deposited layer quality (density of better than 85%, dielectric constant of deposited PZT layer of 760). Deposition rate of PZT was much faster than any other deposition techniques and up to 40 μm of thick PZT layer was successfully formed with proper metal electrode structure.

AB - Fabrication technology was developed for realization of three dimensional micro structure composed of different materials using excimer laser ablation and ultra fine particle jet molding. This method enables micro devices composed of actuator and sensor materials (PZT) and electrodes (metal). SEM observation and density and electrical property measurement showed a good pattern transfer fidelity with sufficient deposited layer quality (density of better than 85%, dielectric constant of deposited PZT layer of 760). Deposition rate of PZT was much faster than any other deposition techniques and up to 40 μm of thick PZT layer was successfully formed with proper metal electrode structure.

UR - https://www.scopus.com/pages/publications/0030679956

M3 - 论文

AN - SCOPUS:0030679956

SP - 135

EP - 140

T2 - Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS

Y2 - 26 January 1997 through 30 January 1997

ER -

Fabrication of three dimensional micro structure composed of different materials using excimer laser ablation and jet molding

Abstract

Conference

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