Fabrication of three-dimensional micro-Rogowski coil based on femtosecond laser micromachining

Xiangwei Meng; Qing Yang; Feng Chen; Chao Shan; Keyin Liu; Xun Hou

doi:10.1007/s00339-015-9236-7

Fabrication of three-dimensional micro-Rogowski coil based on femtosecond laser micromachining

Xiangwei Meng
, Qing Yang
, Feng Chen
, Chao Shan
, Keyin Liu
, Xun Hou

Faculty of Electronic and Information Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

This paper reports an arbitrary-shape designable fabrication of three-dimensional (3D) micro-Rogowski coil inside silica glass by means of femtosecond laser wet etches and metal microsolidics. The dimension of the fabricated micro-Rogowski coil is 800 μm, and the aspect ratio of the structure reaches about 300. The alloys of Bi/In/Sn/Pb with high melting point were used as the conductive metal. The inductance of micro-Rogowski coil is 113.58 nH at 10 kHz and 14.11 nH at 120 MHz, respectively. The embedded 3D micro-Rogowski coils can be easily integrated with other microelectrical, mechanical and optical systems, which could be widely applied in MEMS, sensors and lab-on-chips.

Original language	English
Pages (from-to)	669-674
Number of pages	6
Journal	Applied Physics A: Materials Science and Processing
Volume	120
Issue number	2
DOIs	https://doi.org/10.1007/s00339-015-9236-7
State	Published - 25 Aug 2015

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title = "Fabrication of three-dimensional micro-Rogowski coil based on femtosecond laser micromachining",

abstract = "This paper reports an arbitrary-shape designable fabrication of three-dimensional (3D) micro-Rogowski coil inside silica glass by means of femtosecond laser wet etches and metal microsolidics. The dimension of the fabricated micro-Rogowski coil is 800 μm, and the aspect ratio of the structure reaches about 300. The alloys of Bi/In/Sn/Pb with high melting point were used as the conductive metal. The inductance of micro-Rogowski coil is 113.58 nH at 10 kHz and 14.11 nH at 120 MHz, respectively. The embedded 3D micro-Rogowski coils can be easily integrated with other microelectrical, mechanical and optical systems, which could be widely applied in MEMS, sensors and lab-on-chips.",

author = "Xiangwei Meng and Qing Yang and Feng Chen and Chao Shan and Keyin Liu and Xun Hou",

note = "Publisher Copyright: {\textcopyright} 2015, Springer-Verlag Berlin Heidelberg.",

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T1 - Fabrication of three-dimensional micro-Rogowski coil based on femtosecond laser micromachining

AU - Meng, Xiangwei

AU - Yang, Qing

AU - Chen, Feng

AU - Shan, Chao

AU - Liu, Keyin

AU - Hou, Xun

PY - 2015/8/25

Y1 - 2015/8/25

N2 - This paper reports an arbitrary-shape designable fabrication of three-dimensional (3D) micro-Rogowski coil inside silica glass by means of femtosecond laser wet etches and metal microsolidics. The dimension of the fabricated micro-Rogowski coil is 800 μm, and the aspect ratio of the structure reaches about 300. The alloys of Bi/In/Sn/Pb with high melting point were used as the conductive metal. The inductance of micro-Rogowski coil is 113.58 nH at 10 kHz and 14.11 nH at 120 MHz, respectively. The embedded 3D micro-Rogowski coils can be easily integrated with other microelectrical, mechanical and optical systems, which could be widely applied in MEMS, sensors and lab-on-chips.

AB - This paper reports an arbitrary-shape designable fabrication of three-dimensional (3D) micro-Rogowski coil inside silica glass by means of femtosecond laser wet etches and metal microsolidics. The dimension of the fabricated micro-Rogowski coil is 800 μm, and the aspect ratio of the structure reaches about 300. The alloys of Bi/In/Sn/Pb with high melting point were used as the conductive metal. The inductance of micro-Rogowski coil is 113.58 nH at 10 kHz and 14.11 nH at 120 MHz, respectively. The embedded 3D micro-Rogowski coils can be easily integrated with other microelectrical, mechanical and optical systems, which could be widely applied in MEMS, sensors and lab-on-chips.

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DO - 10.1007/s00339-015-9236-7

M3 - 文章

AN - SCOPUS:84937971443

SN - 0947-8396

VL - 120

SP - 669

EP - 674

JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

IS - 2

ER -

Fabrication of three-dimensional micro-Rogowski coil based on femtosecond laser micromachining

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