Fabrication of optical micro scanner driven by PZT actuators

Takeshi Kobayashi; Jiunnjye Tsaur; Ryutaro Maeda

doi:10.1143/JJAP.44.7078

Fabrication of optical micro scanner driven by PZT actuators

Takeshi Kobayashi
, Jiunnjye Tsaur
, Ryutaro Maeda

National Institute of Advanced Industrial Science and Technology

Research output: Contribution to journal › Article › peer-review

73 Scopus citations

Abstract

We have designed, simulated, fabricated and tested microelectromechanical system (MEMS) based one-dimensional (1D) optical micro scanners driven by piezoelectric actuators. The designed micro scanners have a micro mirror (1 mm × 1 mm) supported by rotation bars connected to hinges and piezoelectric cantilevers. Pt/Ti/PZT/Pt/Ti/SiO₂/SOI multi-layered structure was subjected to MEMS fabrication to form the micro scanners. Through the fabrication, we have obtained 3 types of scanners with 5, 10 and 20μm-wide hinges. The resonant frequency corresponding to a torsional mode was measured to be 4100, 5563 and 6025 Hz, respectively. We also compared the optical scanning angle of the micro scanners actuated at the resonant frequency. The micro scanner with 10 μm-wide hinge actuated at 5563 Hz showed the widest scanning angle. The scanning angle reaches 25 deg at the actuation voltage of 20 V.

Original language	English
Pages (from-to)	7078-7082
Number of pages	5
Journal	Japanese Journal of Applied Physics
Volume	44
Issue number	9 B
DOIs	https://doi.org/10.1143/JJAP.44.7078
State	Published - 22 Sep 2005
Externally published	Yes

Keywords

Chemical solution deposition
Film
MEMS
Micro scanner
PZT
Piezoelectric

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10.1143/JJAP.44.7078

Cite this

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title = "Fabrication of optical micro scanner driven by PZT actuators",

abstract = "We have designed, simulated, fabricated and tested microelectromechanical system (MEMS) based one-dimensional (1D) optical micro scanners driven by piezoelectric actuators. The designed micro scanners have a micro mirror (1 mm × 1 mm) supported by rotation bars connected to hinges and piezoelectric cantilevers. Pt/Ti/PZT/Pt/Ti/SiO2/SOI multi-layered structure was subjected to MEMS fabrication to form the micro scanners. Through the fabrication, we have obtained 3 types of scanners with 5, 10 and 20μm-wide hinges. The resonant frequency corresponding to a torsional mode was measured to be 4100, 5563 and 6025 Hz, respectively. We also compared the optical scanning angle of the micro scanners actuated at the resonant frequency. The micro scanner with 10 μm-wide hinge actuated at 5563 Hz showed the widest scanning angle. The scanning angle reaches 25 deg at the actuation voltage of 20 V.",

keywords = "Chemical solution deposition, Film, MEMS, Micro scanner, PZT, Piezoelectric",

author = "Takeshi Kobayashi and Jiunnjye Tsaur and Ryutaro Maeda",

year = "2005",

month = sep,

day = "22",

doi = "10.1143/JJAP.44.7078",

language = "英语",

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TY - JOUR

T1 - Fabrication of optical micro scanner driven by PZT actuators

AU - Kobayashi, Takeshi

AU - Tsaur, Jiunnjye

AU - Maeda, Ryutaro

PY - 2005/9/22

Y1 - 2005/9/22

N2 - We have designed, simulated, fabricated and tested microelectromechanical system (MEMS) based one-dimensional (1D) optical micro scanners driven by piezoelectric actuators. The designed micro scanners have a micro mirror (1 mm × 1 mm) supported by rotation bars connected to hinges and piezoelectric cantilevers. Pt/Ti/PZT/Pt/Ti/SiO2/SOI multi-layered structure was subjected to MEMS fabrication to form the micro scanners. Through the fabrication, we have obtained 3 types of scanners with 5, 10 and 20μm-wide hinges. The resonant frequency corresponding to a torsional mode was measured to be 4100, 5563 and 6025 Hz, respectively. We also compared the optical scanning angle of the micro scanners actuated at the resonant frequency. The micro scanner with 10 μm-wide hinge actuated at 5563 Hz showed the widest scanning angle. The scanning angle reaches 25 deg at the actuation voltage of 20 V.

AB - We have designed, simulated, fabricated and tested microelectromechanical system (MEMS) based one-dimensional (1D) optical micro scanners driven by piezoelectric actuators. The designed micro scanners have a micro mirror (1 mm × 1 mm) supported by rotation bars connected to hinges and piezoelectric cantilevers. Pt/Ti/PZT/Pt/Ti/SiO2/SOI multi-layered structure was subjected to MEMS fabrication to form the micro scanners. Through the fabrication, we have obtained 3 types of scanners with 5, 10 and 20μm-wide hinges. The resonant frequency corresponding to a torsional mode was measured to be 4100, 5563 and 6025 Hz, respectively. We also compared the optical scanning angle of the micro scanners actuated at the resonant frequency. The micro scanner with 10 μm-wide hinge actuated at 5563 Hz showed the widest scanning angle. The scanning angle reaches 25 deg at the actuation voltage of 20 V.

KW - Chemical solution deposition

KW - Film

KW - MEMS

KW - Micro scanner

KW - PZT

KW - Piezoelectric

UR - https://www.scopus.com/pages/publications/31844437243

U2 - 10.1143/JJAP.44.7078

DO - 10.1143/JJAP.44.7078

M3 - 文章

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SN - 0021-4922

VL - 44

SP - 7078

EP - 7082

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 9 B

ER -

Fabrication of optical micro scanner driven by PZT actuators

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Keywords

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