@inproceedings{c56075d64b8349b0949b3b3ec874a561,
title = "Fabrication of nanogap electrode using electromigration method during metal deposition",
abstract = "In this paper, we suggest a new electormigration method to improve the previous electromigration method. The method is that electrical break-down is carried out during metal deposition for the fabrication of electrodes. As a result, the nanogap structure can be confirmed and break-down current showed lower magnitudes than the previous method. These result indicated possibility of applications to mass production of nanogap electrodes.",
keywords = "electromigration, nanogap",
author = "Tatsuhiko Ohata and Yasuhisa Naitoh and Masayo Horikawa and Wang, \{Dong F.\} and Ryutaro Maeda",
year = "2012",
doi = "10.1109/NEMS.2012.6196777",
language = "英语",
isbn = "9781467311243",
series = "2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012",
pages = "290--293",
booktitle = "2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012",
note = "7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 ; Conference date: 05-03-2012 Through 08-03-2012",
}