TY - GEN
T1 - Fabrication of nano-scale reference materials with Scanning Probe Microscopy (SPM)-based lithography
AU - Jing, Wei Xuan
AU - Jiang, Zhuang De
AU - Zhu, Ming Zhi
AU - Zhao, Feng Xia
AU - Han, Guo Qiang
PY - 2006
Y1 - 2006
N2 - Three SPM-based techniques are put forward to fabricate ID and 2D nano-scale Reference Materials, i.e. Atomic Force Microscopy (AFM) tip-induced anodic oxidation on Si substrate, Scanning Tunneling Microscopy(STM) currentinduced oxidation on Ti film as well as AFM tip-scratching on Au film. The experimental parameters are analyzed and classified. For AFM tip-induced anodic oxidation on Si substrate and STM current-induced oxidation on Ti film, influencing factors include applied tip bias, tip curvature radii, scanning rate, scanning size, surface quality of sample and relative humidity and etc. For AFM tip-scratching, influencing factors include applied tip bias, tip curvature radii, scratching rate, scratching length, scratching cycles, surface quality of sample, and etc. Based on the optimization of the respectively experimental parameters, ID and 2D nano-scale Reference Materials are fabricated. The fabrication accuracy of nano-scale Reference Materials is analyzed, and the relations between the accuracy of the grating line and the respectively experimental parameters are also obtained.
AB - Three SPM-based techniques are put forward to fabricate ID and 2D nano-scale Reference Materials, i.e. Atomic Force Microscopy (AFM) tip-induced anodic oxidation on Si substrate, Scanning Tunneling Microscopy(STM) currentinduced oxidation on Ti film as well as AFM tip-scratching on Au film. The experimental parameters are analyzed and classified. For AFM tip-induced anodic oxidation on Si substrate and STM current-induced oxidation on Ti film, influencing factors include applied tip bias, tip curvature radii, scanning rate, scanning size, surface quality of sample and relative humidity and etc. For AFM tip-scratching, influencing factors include applied tip bias, tip curvature radii, scratching rate, scratching length, scratching cycles, surface quality of sample, and etc. Based on the optimization of the respectively experimental parameters, ID and 2D nano-scale Reference Materials are fabricated. The fabrication accuracy of nano-scale Reference Materials is analyzed, and the relations between the accuracy of the grating line and the respectively experimental parameters are also obtained.
KW - Calibrate
KW - Metrology
KW - Reference material
KW - Scanning probe microscopy
KW - Traceability
UR - https://www.scopus.com/pages/publications/46149122733
U2 - 10.1109/NEMS.2006.334678
DO - 10.1109/NEMS.2006.334678
M3 - 会议稿件
AN - SCOPUS:46149122733
SN - 1424401402
SN - 9781424401406
T3 - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
SP - 1194
EP - 1197
BT - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
T2 - 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Y2 - 18 January 2006 through 21 January 2006
ER -