Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes

Xiangming Li; Yucheng Ding; Jinyou Shao; Hongmiao Tian; Hongzhong Liu

doi:10.1002/adma.201104625

Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes

School of Mechanical Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

94 Scopus citations

Abstract

The microlens array (MLA) or micromirror array (MMA) is one of the most important units in many optical devices and photoelectronic systems. The paper presents a process for fabricating an MLA with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes. The approach has been shown capable of generating large-area and high-quality MLAs or MMAs economically.

Original language	English
Pages (from-to)	OP165-OP169
Journal	Advanced Materials
Volume	24
Issue number	23
DOIs	https://doi.org/10.1002/adma.201104625
State	Published - 19 Jun 2012

Keywords

electrohydrodynamic deformation
microhole templates
microlens arrays
micromirror arrays
micromolding

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10.1002/adma.201104625

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abstract = "The microlens array (MLA) or micromirror array (MMA) is one of the most important units in many optical devices and photoelectronic systems. The paper presents a process for fabricating an MLA with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes. The approach has been shown capable of generating large-area and high-quality MLAs or MMAs economically.",

keywords = "electrohydrodynamic deformation, microhole templates, microlens arrays, micromirror arrays, micromolding",

author = "Xiangming Li and Yucheng Ding and Jinyou Shao and Hongmiao Tian and Hongzhong Liu",

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T1 - Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes

AU - Li, Xiangming

AU - Ding, Yucheng

AU - Shao, Jinyou

AU - Tian, Hongmiao

AU - Liu, Hongzhong

PY - 2012/6/19

Y1 - 2012/6/19

N2 - The microlens array (MLA) or micromirror array (MMA) is one of the most important units in many optical devices and photoelectronic systems. The paper presents a process for fabricating an MLA with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes. The approach has been shown capable of generating large-area and high-quality MLAs or MMAs economically.

AB - The microlens array (MLA) or micromirror array (MMA) is one of the most important units in many optical devices and photoelectronic systems. The paper presents a process for fabricating an MLA with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes. The approach has been shown capable of generating large-area and high-quality MLAs or MMAs economically.

KW - electrohydrodynamic deformation

KW - microhole templates

KW - microlens arrays

KW - micromirror arrays

KW - micromolding

UR - https://www.scopus.com/pages/publications/84862223956

U2 - 10.1002/adma.201104625

DO - 10.1002/adma.201104625

M3 - 文章

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AN - SCOPUS:84862223956

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SP - OP165-OP169

JO - Advanced Materials

JF - Advanced Materials

IS - 23

ER -

Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes

Abstract

Keywords

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