Fabrication of microgrooves in PMN-PT using femtosecond laser irradiation and acid etching

Tianlun Shen; Jinhai Si; Tao Chen; Yongyong Zhuang; Xun Hou

doi:10.1364/AO.459556

Fabrication of microgrooves in PMN-PT using femtosecond laser irradiation and acid etching

Tianlun Shen
, Jinhai Si
, Tao Chen
, Yongyong Zhuang
, Xun Hou

Faculty of Electronic and Information Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

A simple method of fabricating Pb(Mg_1/3Nb₂/3)O₃-PbTiO₃ (PMN-PT) deep grooves with high aspect ratios using an 800-nm femtosecond laser with chemical-selective etching is demonstrated. The 567-µm-deep grooves with aspect ratios of approximately 35 were obtained with no cracks or thermal affected zone. The morphologies and chemical compositions of grooves were analyzed by a scanning electron microscope with an energy dispersive x-ray spectrometer. The formation mechanism of PMN-PT grooves is attributed to the chemical reactions of hydrochloric acid (HCl) and laser-induced structural changes (LISCs). PMN-PT in LISC became amorphous or mixtures of metal oxide from crystal and all the compounds could react with concentrated HCl and form soluble matter, leaving no precipitation. Furthermore, influences of laser irradiation parameters on depths and aspect ratios of grooves are studied.

Original language	English
Pages (from-to)	6234-6240
Number of pages	7
Journal	Applied Optics
Volume	61
Issue number	21
DOIs	https://doi.org/10.1364/AO.459556
State	Published - 20 Jul 2022

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10.1364/AO.459556

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@article{e56853f86d704aa7a6e4d75bfa8766c9,

title = "Fabrication of microgrooves in PMN-PT using femtosecond laser irradiation and acid etching",

abstract = "A simple method of fabricating Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) deep grooves with high aspect ratios using an 800-nm femtosecond laser with chemical-selective etching is demonstrated. The 567-µm-deep grooves with aspect ratios of approximately 35 were obtained with no cracks or thermal affected zone. The morphologies and chemical compositions of grooves were analyzed by a scanning electron microscope with an energy dispersive x-ray spectrometer. The formation mechanism of PMN-PT grooves is attributed to the chemical reactions of hydrochloric acid (HCl) and laser-induced structural changes (LISCs). PMN-PT in LISC became amorphous or mixtures of metal oxide from crystal and all the compounds could react with concentrated HCl and form soluble matter, leaving no precipitation. Furthermore, influences of laser irradiation parameters on depths and aspect ratios of grooves are studied.",

author = "Tianlun Shen and Jinhai Si and Tao Chen and Yongyong Zhuang and Xun Hou",

note = "Publisher Copyright: {\textcopyright} 2022 Optica Publishing Group.",

year = "2022",

month = jul,

day = "20",

doi = "10.1364/AO.459556",

language = "英语",

volume = "61",

pages = "6234--6240",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "Optica Publishing Group",

number = "21",

}

TY - JOUR

T1 - Fabrication of microgrooves in PMN-PT using femtosecond laser irradiation and acid etching

AU - Shen, Tianlun

AU - Si, Jinhai

AU - Chen, Tao

AU - Zhuang, Yongyong

AU - Hou, Xun

PY - 2022/7/20

Y1 - 2022/7/20

N2 - A simple method of fabricating Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) deep grooves with high aspect ratios using an 800-nm femtosecond laser with chemical-selective etching is demonstrated. The 567-µm-deep grooves with aspect ratios of approximately 35 were obtained with no cracks or thermal affected zone. The morphologies and chemical compositions of grooves were analyzed by a scanning electron microscope with an energy dispersive x-ray spectrometer. The formation mechanism of PMN-PT grooves is attributed to the chemical reactions of hydrochloric acid (HCl) and laser-induced structural changes (LISCs). PMN-PT in LISC became amorphous or mixtures of metal oxide from crystal and all the compounds could react with concentrated HCl and form soluble matter, leaving no precipitation. Furthermore, influences of laser irradiation parameters on depths and aspect ratios of grooves are studied.

AB - A simple method of fabricating Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) deep grooves with high aspect ratios using an 800-nm femtosecond laser with chemical-selective etching is demonstrated. The 567-µm-deep grooves with aspect ratios of approximately 35 were obtained with no cracks or thermal affected zone. The morphologies and chemical compositions of grooves were analyzed by a scanning electron microscope with an energy dispersive x-ray spectrometer. The formation mechanism of PMN-PT grooves is attributed to the chemical reactions of hydrochloric acid (HCl) and laser-induced structural changes (LISCs). PMN-PT in LISC became amorphous or mixtures of metal oxide from crystal and all the compounds could react with concentrated HCl and form soluble matter, leaving no precipitation. Furthermore, influences of laser irradiation parameters on depths and aspect ratios of grooves are studied.

UR - https://www.scopus.com/pages/publications/85134432822

U2 - 10.1364/AO.459556

DO - 10.1364/AO.459556

M3 - 文章

C2 - 36256237

AN - SCOPUS:85134432822

SN - 1559-128X

VL - 61

SP - 6234

EP - 6240

JO - Applied Optics

JF - Applied Optics

IS - 21

ER -

Fabrication of microgrooves in PMN-PT using femtosecond laser irradiation and acid etching

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