Fabrication of micro-structures on a PVDF/TiO                         2                          nano-composite film using photocatalytic lithography

Ningli An; Hongzhong Liu; Yucheng Ding; Bingheng Lu; Min Zhang

doi:10.1016/j.apsusc.2012.01.103

Fabrication of micro-structures on a PVDF/TiO ₂ nano-composite film using photocatalytic lithography

Ningli An
, Hongzhong Liu
, Yucheng Ding
, Bingheng Lu
, Min Zhang

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

In the present study, a poly(vinylidene fluoride) (PVDF)/TiO ₂ nano-composite film was prepared by coating a substrate with an acetone/DMF solution, which was then evaporated at a temperature of 110 °C. Micro-structure patterns were fabricated on a PVDF/TiO ₂ nano-composite film with photocatalytic lithography. The morphological and chemical compositions of the micro-structure were investigated by optical microscope, SEM and XPS. Experimental results show that the micro-structure patterns can be directly replicated on the PVDF/TiO ₂ nano-composite film with photocatalytic lithography. The micro-structure is approximately 4 μm in depth which is obtained during the water phase of the process with UV-LED irradiation in 5 h. The results indicate that the fabrication methodology can be potentially applied towards the large-scale fabrication of actuators and sensor devices.

Original language	English
Pages (from-to)	5052-5055
Number of pages	4
Journal	Applied Surface Science
Volume	258
Issue number	12
DOIs	https://doi.org/10.1016/j.apsusc.2012.01.103
State	Published - 1 Apr 2012

Keywords

Degradation
Micro-structure
Photocatalytic
PVDF

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10.1016/j.apsusc.2012.01.103

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title = " Fabrication of micro-structures on a PVDF/TiO 2 nano-composite film using photocatalytic lithography ",

abstract = " In the present study, a poly(vinylidene fluoride) (PVDF)/TiO 2 nano-composite film was prepared by coating a substrate with an acetone/DMF solution, which was then evaporated at a temperature of 110 °C. Micro-structure patterns were fabricated on a PVDF/TiO 2 nano-composite film with photocatalytic lithography. The morphological and chemical compositions of the micro-structure were investigated by optical microscope, SEM and XPS. Experimental results show that the micro-structure patterns can be directly replicated on the PVDF/TiO 2 nano-composite film with photocatalytic lithography. The micro-structure is approximately 4 μm in depth which is obtained during the water phase of the process with UV-LED irradiation in 5 h. The results indicate that the fabrication methodology can be potentially applied towards the large-scale fabrication of actuators and sensor devices.",

keywords = "Degradation, Micro-structure, Photocatalytic, PVDF",

author = "Ningli An and Hongzhong Liu and Yucheng Ding and Bingheng Lu and Min Zhang",

year = "2012",

month = apr,

day = "1",

doi = "10.1016/j.apsusc.2012.01.103",

language = "英语",

volume = "258",

pages = "5052--5055",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier B.V.",

number = "12",

}

Fabrication of micro-structures on a PVDF/TiO ₂ nano-composite film using photocatalytic lithography . / An, Ningli; Liu, Hongzhong; Ding, Yucheng et al.
In: Applied Surface Science, Vol. 258, No. 12, 01.04.2012, p. 5052-5055.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Fabrication of micro-structures on a PVDF/TiO 2 nano-composite film using photocatalytic lithography

AU - An, Ningli

AU - Liu, Hongzhong

AU - Ding, Yucheng

AU - Lu, Bingheng

AU - Zhang, Min

PY - 2012/4/1

Y1 - 2012/4/1

N2 - In the present study, a poly(vinylidene fluoride) (PVDF)/TiO 2 nano-composite film was prepared by coating a substrate with an acetone/DMF solution, which was then evaporated at a temperature of 110 °C. Micro-structure patterns were fabricated on a PVDF/TiO 2 nano-composite film with photocatalytic lithography. The morphological and chemical compositions of the micro-structure were investigated by optical microscope, SEM and XPS. Experimental results show that the micro-structure patterns can be directly replicated on the PVDF/TiO 2 nano-composite film with photocatalytic lithography. The micro-structure is approximately 4 μm in depth which is obtained during the water phase of the process with UV-LED irradiation in 5 h. The results indicate that the fabrication methodology can be potentially applied towards the large-scale fabrication of actuators and sensor devices.

AB - In the present study, a poly(vinylidene fluoride) (PVDF)/TiO 2 nano-composite film was prepared by coating a substrate with an acetone/DMF solution, which was then evaporated at a temperature of 110 °C. Micro-structure patterns were fabricated on a PVDF/TiO 2 nano-composite film with photocatalytic lithography. The morphological and chemical compositions of the micro-structure were investigated by optical microscope, SEM and XPS. Experimental results show that the micro-structure patterns can be directly replicated on the PVDF/TiO 2 nano-composite film with photocatalytic lithography. The micro-structure is approximately 4 μm in depth which is obtained during the water phase of the process with UV-LED irradiation in 5 h. The results indicate that the fabrication methodology can be potentially applied towards the large-scale fabrication of actuators and sensor devices.

KW - Degradation

KW - Micro-structure

KW - Photocatalytic

KW - PVDF

UR - https://www.scopus.com/pages/publications/84862785626

U2 - 10.1016/j.apsusc.2012.01.103

DO - 10.1016/j.apsusc.2012.01.103

M3 - 文章

AN - SCOPUS:84862785626

SN - 0169-4332

VL - 258

SP - 5052

EP - 5055

JO - Applied Surface Science

JF - Applied Surface Science

IS - 12

ER -

Fabrication of micro-structures on a PVDF/TiO ₂ nano-composite film using photocatalytic lithography

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Keywords

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