Fabrication of hundreds of microns three-dimensional single crystal diamond channel along with high aspect ratio by two-step process

Jiao Fu; Yanfeng Wang; Juan Wang; Zhangcheng Liu; Ruozheng Wang; Tianfei Zhu; Yan Liang; Guoqing Shao; Zongchen Liu; Dan Zhao; Xiaohui Chang; Minghui Zhang; Hong Xing Wang

doi:10.1016/j.matlet.2019.126556

Fabrication of hundreds of microns three-dimensional single crystal diamond channel along with high aspect ratio by two-step process

Jiao Fu
, Yanfeng Wang
, Juan Wang
, Zhangcheng Liu
, Ruozheng Wang
, Tianfei Zhu
, Yan Liang
, Guoqing Shao
, Zongchen Liu
, Dan Zhao
, Xiaohui Chang
, Minghui Zhang
, Hong Xing Wang

Faculty of Electronic and Information Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

A hundreds of microns three-dimensional single crystal diamond (SCD) channel along with high aspect ratio has been fabricated successfully by two-step process. Firstly, laser machining technique was used to produce trenches in high-temperature high-pressure SCD substrate. Then, microchannels were achieved by epitaxial lateral overgrowth of diamond layer on patterned substrate by microwave plasma chemical vapor deposition system. Dimensional variations and crystalline quality around the microchannel cross section were analyzed using scanning electron microscopy and Raman spectroscopy. The hollowness and continuity of microchannels were also be tested. It is a significant step towards fabrication of hundreds of microns SCD channel along with controlled high aspect ratio by a simple and controllable way.

Original language	English
Article number	126556
Journal	Materials Letters
Volume	255
DOIs	https://doi.org/10.1016/j.matlet.2019.126556
State	Published - 15 Nov 2019

Keywords

Epitaxial growth
Heat sink
Laser processing
Microchannels
Single crystal diamond
Structural

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10.1016/j.matlet.2019.126556

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@article{86f85573371d45339b0c2443971a9e1d,

title = "Fabrication of hundreds of microns three-dimensional single crystal diamond channel along with high aspect ratio by two-step process",

abstract = "A hundreds of microns three-dimensional single crystal diamond (SCD) channel along with high aspect ratio has been fabricated successfully by two-step process. Firstly, laser machining technique was used to produce trenches in high-temperature high-pressure SCD substrate. Then, microchannels were achieved by epitaxial lateral overgrowth of diamond layer on patterned substrate by microwave plasma chemical vapor deposition system. Dimensional variations and crystalline quality around the microchannel cross section were analyzed using scanning electron microscopy and Raman spectroscopy. The hollowness and continuity of microchannels were also be tested. It is a significant step towards fabrication of hundreds of microns SCD channel along with controlled high aspect ratio by a simple and controllable way.",

keywords = "Epitaxial growth, Heat sink, Laser processing, Microchannels, Single crystal diamond, Structural",

author = "Jiao Fu and Yanfeng Wang and Juan Wang and Zhangcheng Liu and Ruozheng Wang and Tianfei Zhu and Yan Liang and Guoqing Shao and Zongchen Liu and Dan Zhao and Xiaohui Chang and Minghui Zhang and Wang, \{Hong Xing\}",

note = "Publisher Copyright: {\textcopyright} 2019 Elsevier B.V.",

year = "2019",

month = nov,

day = "15",

doi = "10.1016/j.matlet.2019.126556",

language = "英语",

volume = "255",

journal = "Materials Letters",

issn = "0167-577X",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Fabrication of hundreds of microns three-dimensional single crystal diamond channel along with high aspect ratio by two-step process

AU - Fu, Jiao

AU - Wang, Yanfeng

AU - Wang, Juan

AU - Liu, Zhangcheng

AU - Wang, Ruozheng

AU - Zhu, Tianfei

AU - Liang, Yan

AU - Shao, Guoqing

AU - Liu, Zongchen

AU - Zhao, Dan

AU - Chang, Xiaohui

AU - Zhang, Minghui

AU - Wang, Hong Xing

PY - 2019/11/15

Y1 - 2019/11/15

N2 - A hundreds of microns three-dimensional single crystal diamond (SCD) channel along with high aspect ratio has been fabricated successfully by two-step process. Firstly, laser machining technique was used to produce trenches in high-temperature high-pressure SCD substrate. Then, microchannels were achieved by epitaxial lateral overgrowth of diamond layer on patterned substrate by microwave plasma chemical vapor deposition system. Dimensional variations and crystalline quality around the microchannel cross section were analyzed using scanning electron microscopy and Raman spectroscopy. The hollowness and continuity of microchannels were also be tested. It is a significant step towards fabrication of hundreds of microns SCD channel along with controlled high aspect ratio by a simple and controllable way.

AB - A hundreds of microns three-dimensional single crystal diamond (SCD) channel along with high aspect ratio has been fabricated successfully by two-step process. Firstly, laser machining technique was used to produce trenches in high-temperature high-pressure SCD substrate. Then, microchannels were achieved by epitaxial lateral overgrowth of diamond layer on patterned substrate by microwave plasma chemical vapor deposition system. Dimensional variations and crystalline quality around the microchannel cross section were analyzed using scanning electron microscopy and Raman spectroscopy. The hollowness and continuity of microchannels were also be tested. It is a significant step towards fabrication of hundreds of microns SCD channel along with controlled high aspect ratio by a simple and controllable way.

KW - Epitaxial growth

KW - Heat sink

KW - Laser processing

KW - Microchannels

KW - Single crystal diamond

KW - Structural

UR - https://www.scopus.com/pages/publications/85071014644

U2 - 10.1016/j.matlet.2019.126556

DO - 10.1016/j.matlet.2019.126556

M3 - 文章

AN - SCOPUS:85071014644

SN - 0167-577X

VL - 255

JO - Materials Letters

JF - Materials Letters

M1 - 126556

ER -

Fabrication of hundreds of microns three-dimensional single crystal diamond channel along with high aspect ratio by two-step process

Abstract

Keywords

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