Fabrication of high edge-definition steel-tape gratings for optical encoders

Guoyong Ye; Hongzhong Liu; Jiawei Yan; Yaowen Ban; Shanjin Fan; Yongsheng Shi; Lei Yin

doi:10.1063/1.4992028

Fabrication of high edge-definition steel-tape gratings for optical encoders

Guoyong Ye
, Hongzhong Liu
, Jiawei Yan
, Yaowen Ban
, Shanjin Fan
, Yongsheng Shi
, Lei Yin

School of Mechanical Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

High edge definition of a scale grating is the basic prerequisite for high measurement accuracy of optical encoders. This paper presents a novel fabrication method of steel tape gratings using graphene oxide nanoparticles as anti-reflective grating strips. Roll-to-roll nanoimprint lithography is adopted to manufacture the steel tape with hydrophobic and hydrophilic pattern arrays. Self-assembly technology is employed to obtain anti-reflective grating strips by depositing the graphene oxide nanoparticles on hydrophobic regions. A thin SiO₂ coating is deposited on the grating to protect the grating strips. Experimental results confirm that the proposed fabrication process enables a higher edge definition in making steel-tape gratings, and the new steel tape gratings offer better performance than conventional gratings.

Original language	English
Article number	105006
Journal	Review of Scientific Instruments
Volume	88
Issue number	10
DOIs	https://doi.org/10.1063/1.4992028
State	Published - 1 Oct 2017

Access to Document

10.1063/1.4992028

Cite this

@article{12740b2344d549fa9532bf393d6a66c0,

title = "Fabrication of high edge-definition steel-tape gratings for optical encoders",

abstract = "High edge definition of a scale grating is the basic prerequisite for high measurement accuracy of optical encoders. This paper presents a novel fabrication method of steel tape gratings using graphene oxide nanoparticles as anti-reflective grating strips. Roll-to-roll nanoimprint lithography is adopted to manufacture the steel tape with hydrophobic and hydrophilic pattern arrays. Self-assembly technology is employed to obtain anti-reflective grating strips by depositing the graphene oxide nanoparticles on hydrophobic regions. A thin SiO2 coating is deposited on the grating to protect the grating strips. Experimental results confirm that the proposed fabrication process enables a higher edge definition in making steel-tape gratings, and the new steel tape gratings offer better performance than conventional gratings.",

author = "Guoyong Ye and Hongzhong Liu and Jiawei Yan and Yaowen Ban and Shanjin Fan and Yongsheng Shi and Lei Yin",

note = "Publisher Copyright: {\textcopyright} 2017 Author(s).",

year = "2017",

month = oct,

day = "1",

doi = "10.1063/1.4992028",

language = "英语",

volume = "88",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

number = "10",

}

TY - JOUR

T1 - Fabrication of high edge-definition steel-tape gratings for optical encoders

AU - Ye, Guoyong

AU - Liu, Hongzhong

AU - Yan, Jiawei

AU - Ban, Yaowen

AU - Fan, Shanjin

AU - Shi, Yongsheng

AU - Yin, Lei

PY - 2017/10/1

Y1 - 2017/10/1

N2 - High edge definition of a scale grating is the basic prerequisite for high measurement accuracy of optical encoders. This paper presents a novel fabrication method of steel tape gratings using graphene oxide nanoparticles as anti-reflective grating strips. Roll-to-roll nanoimprint lithography is adopted to manufacture the steel tape with hydrophobic and hydrophilic pattern arrays. Self-assembly technology is employed to obtain anti-reflective grating strips by depositing the graphene oxide nanoparticles on hydrophobic regions. A thin SiO2 coating is deposited on the grating to protect the grating strips. Experimental results confirm that the proposed fabrication process enables a higher edge definition in making steel-tape gratings, and the new steel tape gratings offer better performance than conventional gratings.

AB - High edge definition of a scale grating is the basic prerequisite for high measurement accuracy of optical encoders. This paper presents a novel fabrication method of steel tape gratings using graphene oxide nanoparticles as anti-reflective grating strips. Roll-to-roll nanoimprint lithography is adopted to manufacture the steel tape with hydrophobic and hydrophilic pattern arrays. Self-assembly technology is employed to obtain anti-reflective grating strips by depositing the graphene oxide nanoparticles on hydrophobic regions. A thin SiO2 coating is deposited on the grating to protect the grating strips. Experimental results confirm that the proposed fabrication process enables a higher edge definition in making steel-tape gratings, and the new steel tape gratings offer better performance than conventional gratings.

UR - https://www.scopus.com/pages/publications/85032619464

U2 - 10.1063/1.4992028

DO - 10.1063/1.4992028

M3 - 文章

C2 - 29092502

AN - SCOPUS:85032619464

SN - 0034-6748

VL - 88

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 10

M1 - 105006

ER -

Fabrication of high edge-definition steel-tape gratings for optical encoders

Abstract

Access to Document

Other files and links

Fingerprint

Cite this