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Fabrication of complex three-dimensional metallic microstructures based on femtosecond laser micromachining

  • Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

The fabrication of complex metallic microstructures based on femtosecond laser micromachining and metal microsolidify process is demonstrated. This method is beneficial for building complex embedded 3D metal microstructures, electronic components, and hybrid electronic-microfluidic devices.

Original languageEnglish
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO-SI 2015
PublisherOptical Society of America (OSA)
Pages2267
Number of pages1
ISBN (Electronic)9781557529688
DOIs
StatePublished - 4 May 2015
EventCLEO: Science and Innovations, CLEO-SI 2015 - San Jose, United States
Duration: 10 May 201515 May 2015

Publication series

NameCLEO: Science and Innovations, CLEO-SI 2015

Conference

ConferenceCLEO: Science and Innovations, CLEO-SI 2015
Country/TerritoryUnited States
CitySan Jose
Period10/05/1515/05/15

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