@inproceedings{13cdf684aaac47a3a909d0ad1a024309,
title = "Fabrication of complex three-dimensional metallic microstructures based on femtosecond laser micromachining",
abstract = "The fabrication of complex metallic microstructures based on femtosecond laser micromachining and metal microsolidify process is demonstrated. This method is beneficial for building complex embedded 3D metal microstructures, electronic components, and hybrid electronic-microfluidic devices.",
keywords = "Coils, Fabrication, Metals, Microchannels, Microstructure, Three-dimensional displays, Ultrafast optics",
author = "Feng Chen and Qing Yang and Chao Shan and Keying Liu and Xiangwei Meng and Xun Hou",
note = "Publisher Copyright: {\textcopyright} 2015 OSA.; Conference on Lasers and Electro-Optics, CLEO 2015 ; Conference date: 10-05-2015 Through 15-05-2015",
year = "2015",
month = aug,
day = "10",
language = "英语",
series = "Conference on Lasers and Electro-Optics Europe - Technical Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2015 Conference on Lasers and Electro-Optics, CLEO 2015",
}