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Fabrication of close-packed microlens array with superhydrophobicity and high imaging performance

  • Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Microlens arrays (MLAs) with special functions such as superhydrophobicity and self-cleaning ability are highly desired in the micro-optical system which is often used in easily polluted environment. In this paper, a new method is demonstrated to fabricate the MLAs with a high fill factor and superhydrophobicity. The method combines femtosecond laser wet etching, polydimethylsiloxane (PDMS) replication and subsequently femtosecond laser direct writing process. The fabricated MLAs decorated with micro/nanoscale hierarchical structures compared with the normal MLAs. Water droplets on the as-prepared surfaces exhibit superhydrophobicity and ultralow adhesion which endows the fabricated samples possess self-cleaning property. The as-fabricated MLAs could find their applications in bioscience research, ocean exploration, endoscopic surgery, microfluidic system, etc.

Original languageEnglish
Title of host publicationThird International Conference on Photonics and Optical Engineering
EditorsAiling Tian
PublisherSPIE
ISBN (Electronic)9781510627796
DOIs
StatePublished - 2019
Event3rd International Conference on Photonics and Optical Engineering - Xi'an, China
Duration: 5 Dec 20188 Dec 2018

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11052
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference3rd International Conference on Photonics and Optical Engineering
Country/TerritoryChina
CityXi'an
Period5/12/188/12/18

Keywords

  • anti-water
  • femtosecond laser microfabrication
  • high fill factor
  • microlens array
  • superhydrophobicity

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