Fabrication of carbon nanotubes field emitter arrays on the flexible substrate using reversal roller imprint lithography

Fabrication of carbon nanotubes (CNTs) field emitter arrays (FEAs) on flexible substrate was demonstrated with a novel microfabrication technique, namely, reversal roller imprint lithography (RRIL). In this process, CNTs paste was inkjetted coating onto a patterned roller mould and squeezed into the microstructures of the roller mould by an elasticity scraper, and then it was transferred to the flexible substrate with a suitable contact pressure. The field emission measurement showed that the turn-on field was about 2.3 V/μm at the emission current density of 10 μA/cm². This process was suitable for the fabrication of flexible electronic devices with CNTs.