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Fabrication of a random convex-lens-shaped microstructure using a laser ablation

  • Jiwhan Noh
  • , Jae Hoon Lee
  • , Suckjoo Na
  • Korea Institute of Machinery and Materials
  • Korea Advanced Institute of Science and Technology

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

A convex-lens-shaped microstructure with a diameter of 50 μm on a metallic mold substrate was fabricated in this paper. A laser ablation process, in which the laser beam was focused and irradiated on the metallic mold substrate in order to remove a part of the substrate, was used for that. The convex-lens-shaped microstructure has not been reported in any studies of microstructure using the laser ablation process. It was proposed that the unbalanced ablation and re-adherence of the melted particles was the processing mechanism of the convex lens shape. The convex-lens-shaped microstructure fabricated in this study is smaller than the focused spot. It was expected that the same convex-lens-shaped microstructure can be fabricated even if the focused spot size is increased, so long as the fluence of the laser can be maintained. Therefore, the method proposed in this paper will improve the low processing speed, which has been the problem of a laser ablation process. The fabricated convex-lens-shaped microstructure on the metallic substrate can be used as the mold for the micro lens.

Original languageEnglish
Pages (from-to)1307-1312
Number of pages6
JournalCurrent Applied Physics
Volume12
Issue number5
DOIs
StatePublished - Sep 2012

Keywords

  • Convex-lens-shaped microstructure
  • Laser ablation processing
  • Metallic mold substrate
  • Micro lens

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