Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors

Duckbong Seo; Sunghoon Jung; Stephen J. Lombardo; Z. C. Feng; J. K. Chen; Yuwen Zhang

doi:10.1016/j.sna.2010.11.013

Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors

Duckbong Seo
, Sunghoon Jung
, Stephen J. Lombardo
, Z. C. Feng
, J. K. Chen
, Yuwen Zhang

University of Missouri

Research output: Contribution to journal › Article › peer-review

50 Scopus citations

Abstract

In this paper, we describe the fabrication of ceramic thin films for high-temperature heat flux sensors. The polymer-derived ceramic (PDC) thin films are prepared by using soft lithography on pre-ceramic polymer precursors followed by pyrolysis and heat treatment. Processing routes have been developed which lead to thin film resistance-thermal detectors (RTD) that have sufficient mechanical strength for handling and for use in thermal sensing. The effect of annealing temperatures on the electric resistivity of the PDC sensors was investigated. The electrical resistivity of the sensors was measured at different temperatures.

Original language	English
Pages (from-to)	250-255
Number of pages	6
Journal	Sensors and Actuators A: Physical
Volume	165
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2010.11.013
State	Published - Feb 2011
Externally published	Yes

Keywords

Ceramic thin film
Heat flux sensor
Polymer derived ceramics

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10.1016/j.sna.2010.11.013

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title = "Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors",

abstract = "In this paper, we describe the fabrication of ceramic thin films for high-temperature heat flux sensors. The polymer-derived ceramic (PDC) thin films are prepared by using soft lithography on pre-ceramic polymer precursors followed by pyrolysis and heat treatment. Processing routes have been developed which lead to thin film resistance-thermal detectors (RTD) that have sufficient mechanical strength for handling and for use in thermal sensing. The effect of annealing temperatures on the electric resistivity of the PDC sensors was investigated. The electrical resistivity of the sensors was measured at different temperatures.",

keywords = "Ceramic thin film, Heat flux sensor, Polymer derived ceramics",

author = "Duckbong Seo and Sunghoon Jung and Lombardo, \{Stephen J.\} and Feng, \{Z. C.\} and Chen, \{J. K.\} and Yuwen Zhang",

year = "2011",

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doi = "10.1016/j.sna.2010.11.013",

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AU - Seo, Duckbong

AU - Jung, Sunghoon

AU - Lombardo, Stephen J.

AU - Feng, Z. C.

AU - Chen, J. K.

AU - Zhang, Yuwen

PY - 2011/2

Y1 - 2011/2

N2 - In this paper, we describe the fabrication of ceramic thin films for high-temperature heat flux sensors. The polymer-derived ceramic (PDC) thin films are prepared by using soft lithography on pre-ceramic polymer precursors followed by pyrolysis and heat treatment. Processing routes have been developed which lead to thin film resistance-thermal detectors (RTD) that have sufficient mechanical strength for handling and for use in thermal sensing. The effect of annealing temperatures on the electric resistivity of the PDC sensors was investigated. The electrical resistivity of the sensors was measured at different temperatures.

AB - In this paper, we describe the fabrication of ceramic thin films for high-temperature heat flux sensors. The polymer-derived ceramic (PDC) thin films are prepared by using soft lithography on pre-ceramic polymer precursors followed by pyrolysis and heat treatment. Processing routes have been developed which lead to thin film resistance-thermal detectors (RTD) that have sufficient mechanical strength for handling and for use in thermal sensing. The effect of annealing temperatures on the electric resistivity of the PDC sensors was investigated. The electrical resistivity of the sensors was measured at different temperatures.

KW - Ceramic thin film

KW - Heat flux sensor

KW - Polymer derived ceramics

UR - https://www.scopus.com/pages/publications/79951513366

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JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 2

ER -

Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors

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Keywords

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