Fabrication and comparative study of top-gate and bottom-gate ZnO-TFTs with various insulator layers

Transparent ZnO thin film transistors (ZnO-TFTs) with different structures and dielectric layers were fabricated by rf magnetron sputtering. The PbTiO ₃, AlO _x, SiN _x and SiO _x films were attempted to serve as the gate dielectric layers in the devices, respectively, and XRD was employed to investigate the crystal structure of ZnO films deposited on these dielectric layers. The optical properties of transparent TFTs were measured and revealed the average transmittance ranged from 60 to 80% in the visible part of the spectrum. Electrical measurement shows the properties of the ZnO-TFTs have great relations with the device structure. The bottom-gate TFTs have better behaviors than top-gate ones with the mobility, threshold voltage and the current on/off ratio of 18.4 cm ² V ^-1 s ^-1, -0.7 V and 10 ⁴, respectively. The electrical difference of the devices may be due to different character of the interface between the channel and dielectric layers.