Fabrication and Assembly of All-quartz Integrated Resonant Accelerometer with High Stability

Drift degrades stability of MEMS accelerometer a lot, in terms of temperature and long-term impacts. This study proposed an integrated resonant accelerometer with an all-quartz sensitive structure, which was designed to achieve resistance to temperature and long-term drift. Processes such as wet etching, quartz-on-quartz direct bonding, and femtosecond laser micro welding were utilized to fabricate and assemble the prototype. Experimental platforms were built up to characterize its stability, and results demonstrated that the stability at full-temperature range was 34.64 μg/oC, and the long-term stability was less than 100 μg. Combined with stability performances already measured, the accelerometer is comparable to, or even better than, state-of-the-art counterparts without compensation.