Experimental Research on the Characteristics of Atmospheric Pressure Plate Dielectric Barrier Discharge Driven by Different Frequency Power Sources

Atmospheric pressure low temperature plasma is rich of active species and has potential application value in different fields. In this paper, the electrical and optical characteristics of atmospheric pressure parallel plate dielectric barrier discharge (DBD) in helium, including the discharge current peak, discharge power, first breakdown voltage, stable breakdown voltage, emission spectrum and discharge images, are studied by changing the applied voltage frequency. It is found that stable uniform discharge is easier to be produced with higher applied voltage frequency. When applied voltage frequency increases, the stable and first breakdown voltages decrease and increase slightly, respectively. Some nonlinear phenomenon appears in He DBD under some special applied voltage frequencies. By taking discharge images (exposure time ~μs) and optical spectra, it is found that the He DBD presents to be glow discharge in the range of 10~90 kHz; the line intensity of excited OH increases more obviously than that of excited N₂ and N₂⁺.