Experiment on immersion chemical etching technology of fluid micro-channels

As a new type of modern manufacturing technologies, micro-fabrication technology comes into being with the emergence of micro-manufacturing, which realizes the machining and assembly in micro size. The chemical etching technology is one of the major processing methods for micro-fabrication technology, which includes immersing, bubbling, spraying and so on. Among them the equipment of immersion etching is simple, easy to operate and relatively low-cost. In this study, the influence of etching time, concentration of the etching liquid composition, etching temperature and other factors on the chemical etching is mainly studied by using single factor immersion method. The results show that FeCl₃ concentration, H₃PO₄ concentration in the etching liquid, etching temperature and others heavily affected the etching rate, etching uniformity, lateral erosion and surface roughness. It provides elementary process parameters for the micro-manufacturing.