@inproceedings{a21224ea4b1e440095d3c4985882ee00,
title = "Evaluation mechanical properties of MEMS material's",
abstract = "The principles of transforming the original measured data into the real load and displacement of indenter, and determining the related parameters of the load-displacement curve using the least square curve fitting are described. Three methods of computing the real contact projection area are proposed according to the nominal sizes of indenter, the measured sizes of indenter and a lot of indentations on standard blocks or samples. Besides, the program also has a database of mechanical properties of more than 100 MEMS materials for references and some statistic analysis functions for the further analysis. An evaluation result of elastic modulus of Si (100) using indentation is given.",
keywords = "Beam bending, Data pre-processing, Elastic modulus, Fracture toughness, Hardness, MEMS materials, Mechanical properties, Nanoindentation",
author = "Zexiang Zhao and Hairong Wang and Zhuangde Jiang",
year = "2002",
language = "英语",
isbn = "7560317685",
series = "Proceedings of the Second International Symposium on Instrumentation Science and Technology",
pages = "2/139--2/144",
editor = "T. Jiubin and W. Xianfang and T. Jiubin and W. Xianfang",
booktitle = "Proceedings of the Second International Symposium on Instrumentation Science and Technology",
note = "Proceedings of the second International Symposium on Instrumentation Science and Technology ; Conference date: 18-08-2002 Through 22-08-2002",
}