@inproceedings{054bc9cdbde94945bba57f5ce6d195bf,
title = "Estimation of measurement uncertainty of line edge roughness based on the next generation GPS",
abstract = "In this paper Scanning Electron Microscopy (SEM) measurement uncertainty of line edge roughness (LER) is studied based on new Geometrical Product Specifications (GPS). With the operation and operator theories of the new GPS, the verification operator of LER which mainly include extraction operation, edge detection operation and association operation are proposed. According to the GPS uncertainty theories the effect of SEM image noise, sampling length and association criteria on LER measurement results were analyzed, the calculation formulas for uncertainty propagation of key feature operations in operator are put forward, and an algorithm to estimate LER uncertainty based on SEM image is also discussed.",
keywords = "Estimation, Geometrical Product Specifications (GPS), Line Edge Roughness (LER), Uncertainty",
author = "Jiang Zhuangde and Zhao Fengxia and Jing Weixuan and Wang Chenying and Prewett, \{Philip D.\} and Kyle Jiang",
year = "2010",
language = "英语",
isbn = "9781617820199",
series = "10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010",
pages = "63--66",
booktitle = "10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010",
note = "10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 ; Conference date: 05-09-2010 Through 09-09-2010",
}