@inproceedings{6b3c32cd4d0c40888443d1ee22b13f88,
title = "Estimation of AFM tip shape and status in linewidth and profile measurement",
abstract = "A geometric model-based approach is presented to estimate tip shape and status by scanned AFM images and scanned SEM images of AFM tip in linewidth and profile measurement. The interaction between AFM tip and the sample is revealed as tip moves on the sample. The slope angle between the symmetry axis of the tip and the perpendicular to the surface of the investigated sample is characterized as a key parameter of AFM tip status. The method extends the existing characterization methods of AFM tip.",
author = "Guoqiang Han and Zhuangde Jiang and Weixuan Jing",
year = "2010",
doi = "10.1109/INEC.2010.5424591",
language = "英语",
isbn = "9781424435449",
series = "INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings",
pages = "150--151",
booktitle = "INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings",
note = "2010 3rd International Nanoelectronics Conference, INEC 2010 ; Conference date: 03-01-2010 Through 08-01-2010",
}