Abstract
The effect of the machine compliance upon the evaluated values of the mechanical properties of MEMS materials by indentation technique is studied. Based on the principles of Oliver-Pharr evaluation model, systematic errors from machine compliance and its calibration accuracy are analyzed. In addition, error formulas about Young's modulus and hardness caused by both of them are given. Through analysis of error sources, the rules and procedures of accurate calibration for machine compliance are described and applied to a micro-indentation instrument. The evaluated values of Young's modulus and hardness of specimens of Si (100) obtained by corrected instrument are 151.5GPa and 12.8GPa separately, which agree well with literature datum. Different estimated results obtained by before/after correction of the instrument show that the calibration of machine compliance is crucial to indentation measurements.
| Original language | English |
|---|---|
| Pages (from-to) | 339-343 |
| Number of pages | 5 |
| Journal | Jiliang Xuebao/Acta Metrologica Sinica |
| Volume | 28 |
| Issue number | 4 |
| State | Published - Oct 2007 |
Keywords
- Calibration
- Errors
- Indentation
- MEMS
- Machine compliance
- Mechanical properties
- Metrology
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