Errors analysis of ultra-precision measurement system for rotational accuracy of rolling bearings

Several measurement methods error motion of high precision spindle were investigated. Based on the principle and structure of measurement system, the double-probe error separation method was applied to precisely measure the error motion of aerostatic spindle. The precision and stability of the double-probe error separation method were analyzed indirectly by comparing the mandrel roundness results between error separation method and roundness tester. Results showed that the error motion of the aerostatic spindle is measured by the double-probe method precisely and stability. Additional, the measurement results demonstrate that error motion of the aerostatic spindle is much small, and the value slightly increases as the speed increases.