TY - GEN
T1 - Equivalent circuit analysis of CMUTs-based device for measurement in liquid samples
AU - Zhao, Yihe
AU - Zhao, Libo
AU - Barbruni, Gian Luca
AU - Li, Zhikang
AU - Jiang, Zhuangde
AU - Carrara, Sandro
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/6/23
Y1 - 2021/6/23
N2 - Capacitive micromachined ultrasonic transducers (CMUTs) operating at the series and parallel resonant frequencies, have shown a great potential in ultrasonic application and in biodetection. However, previous equivalent circuits rarely consider the fitting performance and measurement. This study proposes the establishment of the simplified equivalent circuits for the CMUTs-based device to analyze the electrical properties and the measurement sensitivity in liquid environment. We simulate a circular CMUT cell both in air and water through finite element method via COMSOL software, exploiting the multi-domain coupling method. We analyze the impedance behaviors of the CMUTs array with 100 cells under different direct current bias voltages (2 - 10V). Simultaneously, we successfully investigate the damping effects on the electrical characteristics such as impedance, phase, and quality factor. With the 4-element Butterworth-vanDyke model, two simplified equivalent lumped element models (LEMs) are demonstrated to fit the impedance curves of the CMUTs array around the series and parallel frequencies, respectively. Additionally, the sensitivity is evaluated using the simplified equivalent LEMs to explore the CMUTs array has a high normalized measurement sensitivity of 6.024 ppb/Hz at the parallel frequency.
AB - Capacitive micromachined ultrasonic transducers (CMUTs) operating at the series and parallel resonant frequencies, have shown a great potential in ultrasonic application and in biodetection. However, previous equivalent circuits rarely consider the fitting performance and measurement. This study proposes the establishment of the simplified equivalent circuits for the CMUTs-based device to analyze the electrical properties and the measurement sensitivity in liquid environment. We simulate a circular CMUT cell both in air and water through finite element method via COMSOL software, exploiting the multi-domain coupling method. We analyze the impedance behaviors of the CMUTs array with 100 cells under different direct current bias voltages (2 - 10V). Simultaneously, we successfully investigate the damping effects on the electrical characteristics such as impedance, phase, and quality factor. With the 4-element Butterworth-vanDyke model, two simplified equivalent lumped element models (LEMs) are demonstrated to fit the impedance curves of the CMUTs array around the series and parallel frequencies, respectively. Additionally, the sensitivity is evaluated using the simplified equivalent LEMs to explore the CMUTs array has a high normalized measurement sensitivity of 6.024 ppb/Hz at the parallel frequency.
KW - Butterworth-vanDyke model
KW - CMUTs-based device
KW - Liquid environment
KW - Measurement
KW - Simplified lumped equivalent model
UR - https://www.scopus.com/pages/publications/85114128967
U2 - 10.1109/MeMeA52024.2021.9478722
DO - 10.1109/MeMeA52024.2021.9478722
M3 - 会议稿件
AN - SCOPUS:85114128967
T3 - 2021 IEEE International Symposium on Medical Measurements and Applications, MeMeA 2021 - Conference Proceedings
BT - 2021 IEEE International Symposium on Medical Measurements and Applications, MeMeA 2021 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2021 IEEE International Symposium on Medical Measurements and Applications, MeMeA 2021
Y2 - 23 June 2021 through 25 June 2021
ER -