Epitaxial BaTiO3 thin films on different substrates for optical waveguide applications

M. Siegert; Judit G. Lisoni; C. H. Lei; A. Eckau; W. Zander; C. L. Jia; J. Schubert; Ch Buchal

Epitaxial BaTiO₃ thin films on different substrates for optical waveguide applications

M. Siegert
, Judit G. Lisoni
, C. H. Lei
, A. Eckau
, W. Zander
, C. L. Jia
, J. Schubert
, Ch Buchal

Faculty of Electronic and Information Engineering

Jülich Research Centre

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

In the process of developing thin film electro-optical waveguides we investigated the influence of different substrates on the optical and structural properties of epitaxial BaTiO₃ thin films. These films are grown by on-axis pulsed laser deposition (PLD) on MgO(100), MgAl₂O₄(100), SrTiO₃(100) and MgO buffered Al₂O₃(11̄02) substrates. The waveguide losses and the refractive indices were measured with a prism coupling setup. The optical data are correlated to the results of Rutherford backscattering spectrometry/ion channeling (RBS/C). X-ray diffraction (XRD), atomic force microscopy (AFM) and transmission electron microscopy (TEM). BaTiO₃ films on MgO(100) substrates show planar waveguide losses of 3 dB/cm and ridge waveguide losses of 5 dB/cm at a wavelength of 633 nm.

Original language	English
Pages (from-to)	145-150
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	597
State	Published - 2000
Event	Thin Films for Optical Waveguide Devices and Materials for Optical Limiting - Boston, MA, USA Duration: 30 Nov 1999 → 3 Dec 1999

Cite this

@article{412e58f516ac47f98e79f2223bdb3209,

title = "Epitaxial BaTiO3 thin films on different substrates for optical waveguide applications",

abstract = "In the process of developing thin film electro-optical waveguides we investigated the influence of different substrates on the optical and structural properties of epitaxial BaTiO3 thin films. These films are grown by on-axis pulsed laser deposition (PLD) on MgO(100), MgAl2O4(100), SrTiO3(100) and MgO buffered Al2O3(1{\=1}02) substrates. The waveguide losses and the refractive indices were measured with a prism coupling setup. The optical data are correlated to the results of Rutherford backscattering spectrometry/ion channeling (RBS/C). X-ray diffraction (XRD), atomic force microscopy (AFM) and transmission electron microscopy (TEM). BaTiO3 films on MgO(100) substrates show planar waveguide losses of 3 dB/cm and ridge waveguide losses of 5 dB/cm at a wavelength of 633 nm.",

author = "M. Siegert and Lisoni, \{Judit G.\} and Lei, \{C. H.\} and A. Eckau and W. Zander and Jia, \{C. L.\} and J. Schubert and Ch Buchal",

year = "2000",

language = "英语",

volume = "597",

pages = "145--150",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Thin Films for Optical Waveguide Devices and Materials for Optical Limiting ; Conference date: 30-11-1999 Through 03-12-1999",

}

TY - JOUR

T1 - Epitaxial BaTiO3 thin films on different substrates for optical waveguide applications

AU - Siegert, M.

AU - Lisoni, Judit G.

AU - Lei, C. H.

AU - Eckau, A.

AU - Zander, W.

AU - Jia, C. L.

AU - Schubert, J.

AU - Buchal, Ch

PY - 2000

Y1 - 2000

N2 - In the process of developing thin film electro-optical waveguides we investigated the influence of different substrates on the optical and structural properties of epitaxial BaTiO3 thin films. These films are grown by on-axis pulsed laser deposition (PLD) on MgO(100), MgAl2O4(100), SrTiO3(100) and MgO buffered Al2O3(11̄02) substrates. The waveguide losses and the refractive indices were measured with a prism coupling setup. The optical data are correlated to the results of Rutherford backscattering spectrometry/ion channeling (RBS/C). X-ray diffraction (XRD), atomic force microscopy (AFM) and transmission electron microscopy (TEM). BaTiO3 films on MgO(100) substrates show planar waveguide losses of 3 dB/cm and ridge waveguide losses of 5 dB/cm at a wavelength of 633 nm.

AB - In the process of developing thin film electro-optical waveguides we investigated the influence of different substrates on the optical and structural properties of epitaxial BaTiO3 thin films. These films are grown by on-axis pulsed laser deposition (PLD) on MgO(100), MgAl2O4(100), SrTiO3(100) and MgO buffered Al2O3(11̄02) substrates. The waveguide losses and the refractive indices were measured with a prism coupling setup. The optical data are correlated to the results of Rutherford backscattering spectrometry/ion channeling (RBS/C). X-ray diffraction (XRD), atomic force microscopy (AFM) and transmission electron microscopy (TEM). BaTiO3 films on MgO(100) substrates show planar waveguide losses of 3 dB/cm and ridge waveguide losses of 5 dB/cm at a wavelength of 633 nm.

UR - https://www.scopus.com/pages/publications/0034543912

M3 - 会议文章

AN - SCOPUS:0034543912

SN - 0272-9172

VL - 597

SP - 145

EP - 150

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Thin Films for Optical Waveguide Devices and Materials for Optical Limiting

Y2 - 30 November 1999 through 3 December 1999

ER -

Epitaxial BaTiO₃ thin films on different substrates for optical waveguide applications

Abstract

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