@inproceedings{0bced12edd1444d381d85acfd19564a0,
title = "Enhanced stability of ITO/In2O3 thin film thermocouples by coating Al2O3 layer",
abstract = "Ceramic thin film thermocouples as a kind of promising candidate thermal sensor have been used to replace noble-metal thin film thermocouples to measure the hot section of turbine energies. ITO (In2O:SnO2=90wt.\%:10wt.\%) and In2O3 thin films with spinning Al2O3 coating layer were investigated systematically and ITO/In2O3 thin film thermocouples were evaluated at 1230°C for a long time. Uncoated ITO and In2O3 thin film annealed at different temperatures exhibited polycrystalline phases and the degree of crystallization become more obvious along with the increase of annealing temperatures. From SEM morphologies, the grain sizes of In2O3 and ITO exhibited increasing trend obviously. When ITO and In2O3 thin films coated with Al2O3 were annealed at 1250°C for different time, the change of thicknesses shown that alumina coating layer could effectively slow down the volatilization of ITO and In2O3 films, especially ITO films. The ITO/In2O3 thin film thermocouple coated with Al2O3 could endure 1230°C for a long time than that of uncoated thermocouple, and the sensitivity could reach to 151.7 pV/°C.",
keywords = "AlO, ITO/InO, sintering temperature, thermocouple, thin film",
author = "Yantao Liu and Dan Liu and Wei Ren and Peng Shi and Ming Liu and Zuoguang Ye and Bian Tian and Zhuangde Jiang",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 16th IEEE SENSORS Conference, ICSENS 2017 ; Conference date: 30-10-2017 Through 01-11-2017",
year = "2017",
month = dec,
day = "21",
doi = "10.1109/ICSENS.2017.8233926",
language = "英语",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1--3",
booktitle = "IEEE SENSORS 2017 - Conference Proceedings",
}