@inproceedings{195867a0d96d40d8a9f79da4c91c220a,
title = "Enhanced perfomance of sensor/actuator integrated piezoelectric microcantilever by using tetragonal compositon PZT thin films",
abstract = "We have largely enhanced the performance of sensor/actuator integrated piezoelectric microcantilevers for electrostatic field sensors, by using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetr-PZT) thin films instead of MPB composition Pb(Zr0.52, Ti 0.48)O3 (MPB-PZT) ones. We have succeeded in optimizing wake-up condition to enhance the piezoelectric property of the tetra-PZT thin films. The maximum output voltage of the sensor/actuator integrated microcantilevers is about 6 times larger than those using MPB-PZT thin films.",
keywords = "PZT, Piezoelectric MEMS, tetragonal, wake-up",
author = "T. Kobayash and N. Makimoto and H. Funakubo and T. Oikawa and A. Wada and T. Itoh and R. Maeda",
year = "2013",
doi = "10.1109/Transducers.2013.6627158",
language = "英语",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "1879--1882",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}