Endurance improvement of more than five orders in GexSe1-x OTS selectors by using a novel refreshing program scheme

  • F. Hatem
  • , Z. Chai
  • , W. Zhang
  • , A. Fantini
  • , R. Degraeve
  • , S. Clima
  • , D. Garbin
  • , J. Robertson
  • , Y. Guo
  • , J. F. Zhang
  • , J. Marsland
  • , P. Freitas
  • , L. Goux
  • , G. S. Kar

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

25 Scopus citations

Abstract

Selector device is critical in high-density cross-point resistive switching memory arrays for suppressing the sneak leakage current path. GexSe1-x based ovonic threshold switch (OTS) selectors have recently demonstrated strong performance with high on-state current, nonlinearity and endurance. Detailed study of its reliability is still lacking and the understanding on the responsible mechanisms is limited. In this work, for the first time, the endurance degradation mechanism of Ge-rich GexSe1-x OTS is identified. Accumulation of slow defects that remain delocalized at off-state and GeSe segregation/crystallization during cycling lead to the recoverable and non-recoverable leakage current, respectively. Most importantly, a refreshing program scheme is developed to recover and prevent the OTS degradation and the endurance can be therefore improved by more than five orders without adding additional material elements or process steps.

Original languageEnglish
Title of host publication2019 IEEE International Electron Devices Meeting, IEDM 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728140315
DOIs
StatePublished - Dec 2019
Externally publishedYes
Event65th Annual IEEE International Electron Devices Meeting, IEDM 2019 - San Francisco, United States
Duration: 7 Dec 201911 Dec 2019

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
Volume2019-December
ISSN (Print)0163-1918

Conference

Conference65th Annual IEEE International Electron Devices Meeting, IEDM 2019
Country/TerritoryUnited States
CitySan Francisco
Period7/12/1911/12/19

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