TY - GEN
T1 - Endurance improvement of more than five orders in GexSe1-x OTS selectors by using a novel refreshing program scheme
AU - Hatem, F.
AU - Chai, Z.
AU - Zhang, W.
AU - Fantini, A.
AU - Degraeve, R.
AU - Clima, S.
AU - Garbin, D.
AU - Robertson, J.
AU - Guo, Y.
AU - Zhang, J. F.
AU - Marsland, J.
AU - Freitas, P.
AU - Goux, L.
AU - Kar, G. S.
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/12
Y1 - 2019/12
N2 - Selector device is critical in high-density cross-point resistive switching memory arrays for suppressing the sneak leakage current path. GexSe1-x based ovonic threshold switch (OTS) selectors have recently demonstrated strong performance with high on-state current, nonlinearity and endurance. Detailed study of its reliability is still lacking and the understanding on the responsible mechanisms is limited. In this work, for the first time, the endurance degradation mechanism of Ge-rich GexSe1-x OTS is identified. Accumulation of slow defects that remain delocalized at off-state and GeSe segregation/crystallization during cycling lead to the recoverable and non-recoverable leakage current, respectively. Most importantly, a refreshing program scheme is developed to recover and prevent the OTS degradation and the endurance can be therefore improved by more than five orders without adding additional material elements or process steps.
AB - Selector device is critical in high-density cross-point resistive switching memory arrays for suppressing the sneak leakage current path. GexSe1-x based ovonic threshold switch (OTS) selectors have recently demonstrated strong performance with high on-state current, nonlinearity and endurance. Detailed study of its reliability is still lacking and the understanding on the responsible mechanisms is limited. In this work, for the first time, the endurance degradation mechanism of Ge-rich GexSe1-x OTS is identified. Accumulation of slow defects that remain delocalized at off-state and GeSe segregation/crystallization during cycling lead to the recoverable and non-recoverable leakage current, respectively. Most importantly, a refreshing program scheme is developed to recover and prevent the OTS degradation and the endurance can be therefore improved by more than five orders without adding additional material elements or process steps.
UR - https://www.scopus.com/pages/publications/85078973141
U2 - 10.1109/IEDM19573.2019.8993448
DO - 10.1109/IEDM19573.2019.8993448
M3 - 会议稿件
AN - SCOPUS:85078973141
T3 - Technical Digest - International Electron Devices Meeting, IEDM
BT - 2019 IEEE International Electron Devices Meeting, IEDM 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 65th Annual IEEE International Electron Devices Meeting, IEDM 2019
Y2 - 7 December 2019 through 11 December 2019
ER -