Elliptical concave microlens arrays built in the photosensitive TiO ₂/ormosils hybrid films

Photosensitive TiO₂/organically modified silane hybrid thin films were prepared by a low-temperature sol-gel spin-coating technique. Optical and structural properties of the hybrid films with different titanium contents were characterized by prism coupling technique, UV-visible spectroscopy, Fourier transform infrared spectroscopy, and thermal gravimetric analysis. Advantages for fabrication of elliptical concave micro-lens arrays (MLAs) based on the as-prepared hybrid films were demonstrated by combining polydimethylsiloxane soft mold with a UV-cured imprint technique. Results indicate that the as-prepared hybrid films have great applicability for the fabrication of photonic components, and the fabrication technique provides a simple and cost-effective way for the fabrication of the sol-gel elliptical concave MLAs.