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Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas

  • D. W. Liu
  • , F. Iza
  • , M. G. Kong
  • Loughborough University

Research output: Contribution to journalArticlepeer-review

95 Scopus citations

Abstract

In atmospheric-pressure plasmas the main electron heating mechanism is Ohmic heating, which has distinct spatial and temporal evolutions in the α and γ modes. In γ discharges, ionizing avalanches in the sheaths are initiated not only by secondary electrons but also by metastable pooling reactions. In α discharges, heating takes place at the sheath edges and in contrast with low-pressure plasmas, close to 50% of the power absorbed by the electrons is absorbed at the edge of the retreating sheaths. This heating is due to a field enhancement caused by the large collisionality in atmospheric-pressure discharges.

Original languageEnglish
Article number261503
JournalApplied Physics Letters
Volume93
Issue number26
DOIs
StatePublished - 2008

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