@inproceedings{926276f0b2b04ae29ea32d8bc0b3118a,
title = "Electron emission properties of cold cathode based on silicon-rich silicon dioxide films prepared by magnetron reaction sputtering",
abstract = "Silicon-rich silicon dioxide (SRSO ) films were formed through deposition of SiOx films by magnetron reaction sputtering together with subsequent rapid temperature annealing treatment. The emission efficiency and emission current density of a cold cathode based on SRSO film reach 10.88\% and 25.78/jA/cm∗ at the applied voltage of 19 V.",
keywords = "Electron emission property, Magnetron reaction sputtering, Silicon-rich silicon dioxide films",
author = "Wei Zhao and Mengyang Zhou and Wenbo Hu",
note = "Publisher Copyright: {\textcopyright} 2016 The Society for Information Display.; 23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016 ; Conference date: 07-12-2016 Through 09-12-2016",
year = "2016",
language = "英语",
series = "23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016",
publisher = "Society for Information Display",
pages = "1113--1116",
booktitle = "23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016",
}