Electrical switching of Ge2Sb2Te5 memory cells based on silicon photonic waveguide microheaters

  • Wen Zhou
  • , Xuan Li
  • , Nathan Youngblood
  • , Wolfram H.P. Pernice
  • , C. David Wright
  • , Harish Bhaskaran

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We demonstrate binary and multilevel electrical programming of the phase change material Ge2Sb2Te5 (GST) memory cells based on ion-implanted silicon-on-insulator (SOI) waveguide microheaters. GST cells can be reversibly switched by using low-amplitude electric pulses.

Original languageEnglish
Title of host publication2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781957171050
StatePublished - 2022
Externally publishedYes
Event2022 Conference on Lasers and Electro-Optics, CLEO 2022 - San Jose, United States
Duration: 15 May 202220 May 2022

Publication series

Name2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings

Conference

Conference2022 Conference on Lasers and Electro-Optics, CLEO 2022
Country/TerritoryUnited States
CitySan Jose
Period15/05/2220/05/22

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