Electrical switching of Ge2Sb2Te5 memory cells based on silicon photonic waveguide microheaters

  • Wen Zhou
  • , Xuan Li
  • , Nathan Youngblood
  • , Wolfram H.P. Pernice
  • , C. David Wright
  • , Harish Bhaskaran

Research output: Contribution to journalConference articlepeer-review

Abstract

We demonstrate binary and multilevel electrical programming of the phase change material Ge2Sb2Te5 (GST) memory cells based on ion-implanted silicon-on-insulator (SOI) waveguide microheaters. GST cells can be reversibly switched by using low-amplitude electric pulses.

Original languageEnglish
Article numberSF2N.5
JournalOptics InfoBase Conference Papers
StatePublished - 2022
Externally publishedYes
EventCLEO: Science and Innovations, S and I 2022 - San Jose, United States
Duration: 15 May 202220 May 2022

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