TY - JOUR
T1 - Electrical switching of Ge2Sb2Te5 memory cells based on silicon photonic waveguide microheaters
AU - Zhou, Wen
AU - Li, Xuan
AU - Youngblood, Nathan
AU - Pernice, Wolfram H.P.
AU - Wright, C. David
AU - Bhaskaran, Harish
N1 - Publisher Copyright:
© Optica Publishing Group 2022, © 2022 The Author(s)
PY - 2022
Y1 - 2022
N2 - We demonstrate binary and multilevel electrical programming of the phase change material Ge2Sb2Te5 (GST) memory cells based on ion-implanted silicon-on-insulator (SOI) waveguide microheaters. GST cells can be reversibly switched by using low-amplitude electric pulses.
AB - We demonstrate binary and multilevel electrical programming of the phase change material Ge2Sb2Te5 (GST) memory cells based on ion-implanted silicon-on-insulator (SOI) waveguide microheaters. GST cells can be reversibly switched by using low-amplitude electric pulses.
UR - https://www.scopus.com/pages/publications/85136816051
M3 - 会议文章
AN - SCOPUS:85136816051
SN - 2162-2701
JO - Optics InfoBase Conference Papers
JF - Optics InfoBase Conference Papers
M1 - SF2N.5
T2 - CLEO: Science and Innovations, S and I 2022
Y2 - 15 May 2022 through 20 May 2022
ER -