Electric-Field-Driven Generative Nanoimprinting for Tilted Metasurface Nanostructures

Yu Fan; Chunhui Wang; Hongmiao Tian; Xiaoming Chen; Ben Q. Li; Zhaomin Wang; Xiangming Li; Xiaoliang Chen; Jinyou Shao

doi:10.1007/s40820-025-01857-3

Electric-Field-Driven Generative Nanoimprinting for Tilted Metasurface Nanostructures

Yu Fan
, Chunhui Wang
, Hongmiao Tian
, Xiaoming Chen
, Ben Q. Li
, Zhaomin Wang
, Xiangming Li
, Xiaoliang Chen
, Jinyou Shao

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

The developed electric-field-driven generative-nanoimprinting technology enables direct fabrication of large-area tilted metasurface nanostructures with cost-efficiency and high-throughput advantages. Real-time tuning of process parameters facilitates customized fabrication of various tilted metasurface nanostructures. Integration of these custom-designed high-angle-tilted nanostructures into augmented reality displays achieves superior image quality.

Original language	English
Article number	12
Journal	Nano-Micro Letters
Volume	18
Issue number	1
DOIs	https://doi.org/10.1007/s40820-025-01857-3
State	Published - Dec 2026

Keywords

Electric field assistance
Generative nanoimprinting
Large-area fabrication
Tilted metasurface structures

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10.1007/s40820-025-01857-3

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title = "Electric-Field-Driven Generative Nanoimprinting for Tilted Metasurface Nanostructures",

abstract = "The developed electric-field-driven generative-nanoimprinting technology enables direct fabrication of large-area tilted metasurface nanostructures with cost-efficiency and high-throughput advantages. Real-time tuning of process parameters facilitates customized fabrication of various tilted metasurface nanostructures. Integration of these custom-designed high-angle-tilted nanostructures into augmented reality displays achieves superior image quality.",

keywords = "Electric field assistance, Generative nanoimprinting, Large-area fabrication, Tilted metasurface structures",

author = "Yu Fan and Chunhui Wang and Hongmiao Tian and Xiaoming Chen and Li, \{Ben Q.\} and Zhaomin Wang and Xiangming Li and Xiaoliang Chen and Jinyou Shao",

note = "Publisher Copyright: {\textcopyright} The Author(s) 2025.",

year = "2026",

month = dec,

doi = "10.1007/s40820-025-01857-3",

language = "英语",

volume = "18",

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TY - JOUR

T1 - Electric-Field-Driven Generative Nanoimprinting for Tilted Metasurface Nanostructures

AU - Fan, Yu

AU - Wang, Chunhui

AU - Tian, Hongmiao

AU - Chen, Xiaoming

AU - Li, Ben Q.

AU - Wang, Zhaomin

AU - Li, Xiangming

AU - Chen, Xiaoliang

AU - Shao, Jinyou

N1 - Publisher Copyright: © The Author(s) 2025.

PY - 2026/12

Y1 - 2026/12

N2 - The developed electric-field-driven generative-nanoimprinting technology enables direct fabrication of large-area tilted metasurface nanostructures with cost-efficiency and high-throughput advantages. Real-time tuning of process parameters facilitates customized fabrication of various tilted metasurface nanostructures. Integration of these custom-designed high-angle-tilted nanostructures into augmented reality displays achieves superior image quality.

AB - The developed electric-field-driven generative-nanoimprinting technology enables direct fabrication of large-area tilted metasurface nanostructures with cost-efficiency and high-throughput advantages. Real-time tuning of process parameters facilitates customized fabrication of various tilted metasurface nanostructures. Integration of these custom-designed high-angle-tilted nanostructures into augmented reality displays achieves superior image quality.

KW - Electric field assistance

KW - Generative nanoimprinting

KW - Large-area fabrication

KW - Tilted metasurface structures

UR - https://www.scopus.com/pages/publications/105016587512

U2 - 10.1007/s40820-025-01857-3

DO - 10.1007/s40820-025-01857-3

M3 - 文章

AN - SCOPUS:105016587512

SN - 2311-6706

VL - 18

JO - Nano-Micro Letters

JF - Nano-Micro Letters

IS - 1

M1 - 12

ER -

Electric-Field-Driven Generative Nanoimprinting for Tilted Metasurface Nanostructures

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Keywords

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