Effects of Si addition on structure and mechanical properties of TiAlSiCN coatings

Xuhai Zhang; Juan Li; Jingcai Xiao; Jinhong Pi; Guangyu He; Long Chen; Yuqiao Zeng; Jianqing Jiang

doi:10.1016/j.surfcoat.2019.01.056

Effects of Si addition on structure and mechanical properties of TiAlSiCN coatings

Xuhai Zhang
, Juan Li
, Jingcai Xiao
, Jinhong Pi
, Guangyu He
, Long Chen
, Yuqiao Zeng
, Jianqing Jiang

Southeast University, Nanjing
Nanjing Institute of Technology
Air Force Engineering University Xian
Nanjing Forestry University

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

TiAlSiCN coatings were deposited by radio frequency reactive magnetron co-sputtering. In the coatings, the Si content is tuned by using targets with different Si additions. The structures and mechanical properties of the TiAlSiCN coatings were strongly depended on the Si content. The Si ~3 at.% sample exhibits the highest hardness of 38 GPa among the coatings prepared in this work. The nanocomposite microstructure containing B1-TiN nanocrystals with C:N ≈ 1:1 and combined C, SiN _x and SiC _x amorphous phases is attributed to the enhanced hardness.

Original language	English
Pages (from-to)	21-26
Number of pages	6
Journal	Surface and Coatings Technology
Volume	362
DOIs	https://doi.org/10.1016/j.surfcoat.2019.01.056
State	Published - 25 Mar 2019
Externally published	Yes

Keywords

Hardness
Magnetron sputtering
Microstructure
Nanocomposite
TiAlSiCN coatings

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10.1016/j.surfcoat.2019.01.056

Cite this

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title = "Effects of Si addition on structure and mechanical properties of TiAlSiCN coatings",

abstract = " TiAlSiCN coatings were deposited by radio frequency reactive magnetron co-sputtering. In the coatings, the Si content is tuned by using targets with different Si additions. The structures and mechanical properties of the TiAlSiCN coatings were strongly depended on the Si content. The Si \textasciitilde{}3 at.\% sample exhibits the highest hardness of 38 GPa among the coatings prepared in this work. The nanocomposite microstructure containing B1-TiN nanocrystals with C:N ≈ 1:1 and combined C, SiN x and SiC x amorphous phases is attributed to the enhanced hardness.",

keywords = "Hardness, Magnetron sputtering, Microstructure, Nanocomposite, TiAlSiCN coatings",

author = "Xuhai Zhang and Juan Li and Jingcai Xiao and Jinhong Pi and Guangyu He and Long Chen and Yuqiao Zeng and Jianqing Jiang",

note = "Publisher Copyright: {\textcopyright} 2019 Elsevier B.V.",

year = "2019",

month = mar,

day = "25",

doi = "10.1016/j.surfcoat.2019.01.056",

language = "英语",

volume = "362",

pages = "21--26",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Effects of Si addition on structure and mechanical properties of TiAlSiCN coatings

AU - Zhang, Xuhai

AU - Li, Juan

AU - Xiao, Jingcai

AU - Pi, Jinhong

AU - He, Guangyu

AU - Chen, Long

AU - Zeng, Yuqiao

AU - Jiang, Jianqing

PY - 2019/3/25

Y1 - 2019/3/25

N2 - TiAlSiCN coatings were deposited by radio frequency reactive magnetron co-sputtering. In the coatings, the Si content is tuned by using targets with different Si additions. The structures and mechanical properties of the TiAlSiCN coatings were strongly depended on the Si content. The Si ~3 at.% sample exhibits the highest hardness of 38 GPa among the coatings prepared in this work. The nanocomposite microstructure containing B1-TiN nanocrystals with C:N ≈ 1:1 and combined C, SiN x and SiC x amorphous phases is attributed to the enhanced hardness.

AB - TiAlSiCN coatings were deposited by radio frequency reactive magnetron co-sputtering. In the coatings, the Si content is tuned by using targets with different Si additions. The structures and mechanical properties of the TiAlSiCN coatings were strongly depended on the Si content. The Si ~3 at.% sample exhibits the highest hardness of 38 GPa among the coatings prepared in this work. The nanocomposite microstructure containing B1-TiN nanocrystals with C:N ≈ 1:1 and combined C, SiN x and SiC x amorphous phases is attributed to the enhanced hardness.

KW - Hardness

KW - Magnetron sputtering

KW - Microstructure

KW - Nanocomposite

KW - TiAlSiCN coatings

UR - https://www.scopus.com/pages/publications/85060550980

U2 - 10.1016/j.surfcoat.2019.01.056

DO - 10.1016/j.surfcoat.2019.01.056

M3 - 文章

AN - SCOPUS:85060550980

SN - 0257-8972

VL - 362

SP - 21

EP - 26

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Effects of Si addition on structure and mechanical properties of TiAlSiCN coatings

Abstract

Keywords

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