Effects of rapid thermal annealing on nucleation and growth behavior of lead zirconate titanate films

Jian Lu; Yi Zhang; Tsuyoshi Ikehara; Takashi Mihara; Ryutaro Maeda

doi:10.1109/ISAF.2007.4393174

Effects of rapid thermal annealing on nucleation and growth behavior of lead zirconate titanate films

Jian Lu
, Yi Zhang
, Tsuyoshi Ikehara
, Takashi Mihara
, Ryutaro Maeda

National Institute of Advanced Industrial Science and Technology
Olympus Corporation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

This paper investigated the effects of rapid thermal annealing (RTA) on nucleation and growth behavior of sol-gel derived lead zirconate titanate (PZT) films. The effects of RTA on films' surface morphology, residual stress and orientation were also studied. It was found that residual stress of the film can be effectively reduced by extending the RTA time. High heating-rate was preferred for uniform PZT film nucleation and grain-growth, which resulted in dense microstructures and smooth film surface. Low heating-rate lead to strong PZT (100) orientation and low residual stress, but at the risk of film-crack caused by arbitrarily distributed large crystallites of about 300 nm in diameter among those with diameter of ∼30 nm.

Original language	English
Title of host publication	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Pages	83-86
Number of pages	4
DOIs	https://doi.org/10.1109/ISAF.2007.4393174
State	Published - 2007
Externally published	Yes
Event	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan Duration: 27 May 2007 → 31 May 2007

Publication series

Name	IEEE International Symposium on Applications of Ferroelectrics

Conference

Conference	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Country/Territory	Japan
City	Nara-city
Period	27/05/07 → 31/05/07

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10.1109/ISAF.2007.4393174

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Lu, J., Zhang, Y., Ikehara, T., Mihara, T., & Maeda, R. (2007). Effects of rapid thermal annealing on nucleation and growth behavior of lead zirconate titanate films. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF (pp. 83-86). Article 4393174 (IEEE International Symposium on Applications of Ferroelectrics). https://doi.org/10.1109/ISAF.2007.4393174

@inproceedings{2704185b9d7845a082264ee93c93480c,

title = "Effects of rapid thermal annealing on nucleation and growth behavior of lead zirconate titanate films",

abstract = "This paper investigated the effects of rapid thermal annealing (RTA) on nucleation and growth behavior of sol-gel derived lead zirconate titanate (PZT) films. The effects of RTA on films' surface morphology, residual stress and orientation were also studied. It was found that residual stress of the film can be effectively reduced by extending the RTA time. High heating-rate was preferred for uniform PZT film nucleation and grain-growth, which resulted in dense microstructures and smooth film surface. Low heating-rate lead to strong PZT (100) orientation and low residual stress, but at the risk of film-crack caused by arbitrarily distributed large crystallites of about 300 nm in diameter among those with diameter of ∼30 nm.",

author = "Jian Lu and Yi Zhang and Tsuyoshi Ikehara and Takashi Mihara and Ryutaro Maeda",

year = "2007",

doi = "10.1109/ISAF.2007.4393174",

language = "英语",

isbn = "1424413338",

series = "IEEE International Symposium on Applications of Ferroelectrics",

pages = "83--86",

booktitle = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF",

note = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF ; Conference date: 27-05-2007 Through 31-05-2007",

}

Lu, J, Zhang, Y, Ikehara, T, Mihara, T & Maeda, R 2007, Effects of rapid thermal annealing on nucleation and growth behavior of lead zirconate titanate films. in 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF., 4393174, IEEE International Symposium on Applications of Ferroelectrics, pp. 83-86, 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF, Nara-city, Japan, 27/05/07. https://doi.org/10.1109/ISAF.2007.4393174

Effects of rapid thermal annealing on nucleation and growth behavior of lead zirconate titanate films. / Lu, Jian; Zhang, Yi; Ikehara, Tsuyoshi et al.
2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. p. 83-86 4393174 (IEEE International Symposium on Applications of Ferroelectrics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Effects of rapid thermal annealing on nucleation and growth behavior of lead zirconate titanate films

AU - Lu, Jian

AU - Zhang, Yi

AU - Ikehara, Tsuyoshi

AU - Mihara, Takashi

AU - Maeda, Ryutaro

PY - 2007

Y1 - 2007

N2 - This paper investigated the effects of rapid thermal annealing (RTA) on nucleation and growth behavior of sol-gel derived lead zirconate titanate (PZT) films. The effects of RTA on films' surface morphology, residual stress and orientation were also studied. It was found that residual stress of the film can be effectively reduced by extending the RTA time. High heating-rate was preferred for uniform PZT film nucleation and grain-growth, which resulted in dense microstructures and smooth film surface. Low heating-rate lead to strong PZT (100) orientation and low residual stress, but at the risk of film-crack caused by arbitrarily distributed large crystallites of about 300 nm in diameter among those with diameter of ∼30 nm.

AB - This paper investigated the effects of rapid thermal annealing (RTA) on nucleation and growth behavior of sol-gel derived lead zirconate titanate (PZT) films. The effects of RTA on films' surface morphology, residual stress and orientation were also studied. It was found that residual stress of the film can be effectively reduced by extending the RTA time. High heating-rate was preferred for uniform PZT film nucleation and grain-growth, which resulted in dense microstructures and smooth film surface. Low heating-rate lead to strong PZT (100) orientation and low residual stress, but at the risk of film-crack caused by arbitrarily distributed large crystallites of about 300 nm in diameter among those with diameter of ∼30 nm.

UR - https://www.scopus.com/pages/publications/51349159363

U2 - 10.1109/ISAF.2007.4393174

DO - 10.1109/ISAF.2007.4393174

M3 - 会议稿件

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SN - 1424413338

SN - 9781424413331

T3 - IEEE International Symposium on Applications of Ferroelectrics

SP - 83

EP - 86

BT - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF

T2 - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF

Y2 - 27 May 2007 through 31 May 2007

ER -

Effects of rapid thermal annealing on nucleation and growth behavior of lead zirconate titanate films

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