Effect of Zr/Ti ratio on microstructure and electrical properties of lead zirconate titanate thin films derived by pulsed laser deposition

Zhanxy Jie Wang; Yuki Aoki; Hiroyuki Kokawa; Masaaki Ichiki; Ryutaro Maeda

doi:10.1007/s10832-004-5073-4

Effect of Zr/Ti ratio on microstructure and electrical properties of lead zirconate titanate thin films derived by pulsed laser deposition

Zhanxy Jie Wang
, Yuki Aoki
, Hiroyuki Kokawa
, Masaaki Ichiki
, Ryutaro Maeda

Tohoku University
National Institute of Advanced Industrial Science and Technology

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

PZT films were fabricated using various targets of Pb(Zr _x Ti_{1 - x} )O₃ with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70, and with excess PbO of 20 wt% on Pt/Ti/SiO₂/Si(100) substrates. The rosette structure was observed in the films derived from the target with a Zr/Ti ratio of 70/30 and disappeared with increasing titanium composition. The observations on surface and cross-sectional microstructure were consistent with a higher perovskite nucleation for the higher Ti content films. The PZT films derived from the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout the thickness of the film and no pyrochlore phase on the surface was observed. The PZT films derived from the target with a Zr/Ti ratio of 45/55 exhibited better electric properties than those derived from the target with a Zr/Ti ratio of 52/48.

Original language	English
Pages (from-to)	41-45
Number of pages	5
Journal	Journal of Electroceramics
Volume	13
Issue number	1-3
DOIs	https://doi.org/10.1007/s10832-004-5073-4
State	Published - Jul 2004
Externally published	Yes

Keywords

Crystalline phases
Ferroelectric properties
Lead zirconate titanate
Microstructure
Pulsed laser deposition
Thin film

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10.1007/s10832-004-5073-4

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@article{e5e0f5a97b90448393e5ebc74bc6cde2,

title = "Effect of Zr/Ti ratio on microstructure and electrical properties of lead zirconate titanate thin films derived by pulsed laser deposition",

abstract = "PZT films were fabricated using various targets of Pb(Zr x Ti1 - x )O3 with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70, and with excess PbO of 20 wt\% on Pt/Ti/SiO2/Si(100) substrates. The rosette structure was observed in the films derived from the target with a Zr/Ti ratio of 70/30 and disappeared with increasing titanium composition. The observations on surface and cross-sectional microstructure were consistent with a higher perovskite nucleation for the higher Ti content films. The PZT films derived from the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout the thickness of the film and no pyrochlore phase on the surface was observed. The PZT films derived from the target with a Zr/Ti ratio of 45/55 exhibited better electric properties than those derived from the target with a Zr/Ti ratio of 52/48.",

keywords = "Crystalline phases, Ferroelectric properties, Lead zirconate titanate, Microstructure, Pulsed laser deposition, Thin film",

author = "Wang, \{Zhanxy Jie\} and Yuki Aoki and Hiroyuki Kokawa and Masaaki Ichiki and Ryutaro Maeda",

year = "2004",

month = jul,

doi = "10.1007/s10832-004-5073-4",

language = "英语",

volume = "13",

pages = "41--45",

journal = "Journal of Electroceramics",

issn = "1385-3449",

publisher = "Springer Netherlands",

number = "1-3",

}

TY - JOUR

T1 - Effect of Zr/Ti ratio on microstructure and electrical properties of lead zirconate titanate thin films derived by pulsed laser deposition

AU - Wang, Zhanxy Jie

AU - Aoki, Yuki

AU - Kokawa, Hiroyuki

AU - Ichiki, Masaaki

AU - Maeda, Ryutaro

PY - 2004/7

Y1 - 2004/7

N2 - PZT films were fabricated using various targets of Pb(Zr x Ti1 - x )O3 with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70, and with excess PbO of 20 wt% on Pt/Ti/SiO2/Si(100) substrates. The rosette structure was observed in the films derived from the target with a Zr/Ti ratio of 70/30 and disappeared with increasing titanium composition. The observations on surface and cross-sectional microstructure were consistent with a higher perovskite nucleation for the higher Ti content films. The PZT films derived from the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout the thickness of the film and no pyrochlore phase on the surface was observed. The PZT films derived from the target with a Zr/Ti ratio of 45/55 exhibited better electric properties than those derived from the target with a Zr/Ti ratio of 52/48.

AB - PZT films were fabricated using various targets of Pb(Zr x Ti1 - x )O3 with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70, and with excess PbO of 20 wt% on Pt/Ti/SiO2/Si(100) substrates. The rosette structure was observed in the films derived from the target with a Zr/Ti ratio of 70/30 and disappeared with increasing titanium composition. The observations on surface and cross-sectional microstructure were consistent with a higher perovskite nucleation for the higher Ti content films. The PZT films derived from the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout the thickness of the film and no pyrochlore phase on the surface was observed. The PZT films derived from the target with a Zr/Ti ratio of 45/55 exhibited better electric properties than those derived from the target with a Zr/Ti ratio of 52/48.

KW - Crystalline phases

KW - Ferroelectric properties

KW - Lead zirconate titanate

KW - Microstructure

KW - Pulsed laser deposition

KW - Thin film

UR - https://www.scopus.com/pages/publications/17044362239

U2 - 10.1007/s10832-004-5073-4

DO - 10.1007/s10832-004-5073-4

M3 - 文章

AN - SCOPUS:17044362239

SN - 1385-3449

VL - 13

SP - 41

EP - 45

JO - Journal of Electroceramics

JF - Journal of Electroceramics

IS - 1-3

ER -

Effect of Zr/Ti ratio on microstructure and electrical properties of lead zirconate titanate thin films derived by pulsed laser deposition

Abstract

Keywords

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