Abstract
A room temperature bonding method in ultrahigh vacuum is applied to butt joint between Al alloy and ceramics. In the method the surface of Al alloy specimen is sputter-etched by Ar ion of DC glow-discharge plasma. At the same time Al sputter-deposited film is formed on the surface of ceramics faced to Al specimen. Activated surfaces of both specimens are joined. Surfaces of both specimen are contacted and scrubbed to each other before they are joined. But the effects of friction are negligible. Surfaces of Al-alloy and ceramics are prepared into some different surface roughness conditions and profiles. Surface profiles of ceramic specimens have very important role in bonding process. Al2O3, ZrO2 and Si3N4 are used as ceramic specimens and Si3N4 needs high pressure to join compared to others.
| Original language | English |
|---|---|
| Pages (from-to) | 463-469 |
| Number of pages | 7 |
| Journal | Kikai Gijutsu Kenkyusho Shoho/Journal of Mechanical Engineering Laboratory |
| Volume | 46 |
| Issue number | 6 |
| State | Published - Nov 1992 |
| Externally published | Yes |