Effect of geometrical design of support on frequency shift and energy loss of piezoelectric ring resonator applicable to liquid circumstance

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

A ring-shaped piezoelectric resonator was proposed for health monitoring. The proposed resonator is believed to be experienced several energy loss mechanisms, when used in air or liquid circumstance. Actually, the quality factor of film bulk acoustic resonator in liquid might be decreased to 5% of that in air. So, it is necessary to accomplish suitable structural design and select proper vibration mode to reduce the energy loss of the resonator especially in liquid application. For the pursuit of high sensitivity, we studied the effect of support geometry on frequency shift and energy loss. It was found that low-amplitude vibration area is smaller at narrow support, and frequency shift of trapezoid support is higher than that of rectangle support.

Original languageEnglish
Title of host publication2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Pages591-594
Number of pages4
DOIs
StatePublished - 2012
Externally publishedYes
Event7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan
Duration: 5 Mar 20128 Mar 2012

Publication series

Name2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Conference

Conference7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Country/TerritoryJapan
CityKyoto
Period5/03/128/03/12

Keywords

  • Frequency shift
  • Health monitoring
  • Piezoelectric thin film
  • Ring-shaped resonator
  • Support loss
  • Vibration mode shape

Fingerprint

Dive into the research topics of 'Effect of geometrical design of support on frequency shift and energy loss of piezoelectric ring resonator applicable to liquid circumstance'. Together they form a unique fingerprint.

Cite this