Effect of diffusion barrier on surface morphology and structure of Cu-Zr alloy films

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Original language	English
Pages (from-to)	119
Number of pages	1
Journal	Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices
Volume	8
Issue number	2
State	Published - Jun 2002

Cite this

@article{15f67e19cab340438c210856167593a5,

title = "Effect of diffusion barrier on surface morphology and structure of Cu-Zr alloy films",

author = "Song, \{Zhong Xiao\} and Wu Tang and Xu, \{Ke Wei\}",

year = "2002",

month = jun,

language = "英语",

volume = "8",

pages = "119",

journal = "Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices",

issn = "1007-4252",

publisher = "Chinese Academy of Sciences",

number = "2",

}

TY - JOUR

T1 - Effect of diffusion barrier on surface morphology and structure of Cu-Zr alloy films

AU - Song, Zhong Xiao

AU - Tang, Wu

AU - Xu, Ke Wei

PY - 2002/6

Y1 - 2002/6

UR - https://www.scopus.com/pages/publications/0036620848

M3 - 文章

AN - SCOPUS:0036620848

SN - 1007-4252

VL - 8

SP - 119

JO - Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices

JF - Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices

IS - 2

ER -